SY

D side D B M C8 8 One-touch fitting 2 to 16 stations FU1 Fuji Electric Co., Ltd.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB = ~Hs Auto switch = ~ Hs Auto switch MB1 CA2 CS1 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NTL D-G5BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF C76 D-G5NTL D-G59F D-H7C D-G5BAL D-C7/C8 D-H7 D-H7W D-H7F D-H7BAL D-B5/B6 D-B59W D-G5/K5 D-G5W D-K59W Auto switch model D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-B59W C85 Bore size (mm) C95 HS

CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

Cylinder with Lock Series CNG

HS Auto switch Auto switch 12 8.5 24.5 16 A B A B 33 38.2 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-C7, C8 D-H7 D-H7W D-H7F D-H7BA D-H7 D-H7C D-H7W D-H7BA D-C7, C8 D-C73C D-C80C D-B5, B6 D-C73C D-C80C D-B5, B6 D-B59W D-G5NT D-H7C D-G5NT D-B59W D-H7F Bore size (mm) A A B A B A A HS HS HS B B B B A 20.5 (28.5) 14.5 (22.5) 17.5 (25.5) 19.5 (27.5)

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Compact 5-Port Solenoid Valve

D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

Basic Type/Direct Mount Type

Note 4) D-Z7 and D-Y types cannot be mounted. 25 to 63 (mm) Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA A B C D D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y7BA D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 Bore size (mm) 25 32 40 50 63 19 23 18 98 94 99 42 38 43 75 79 74 22.5 26.5

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

Table of Contents

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Air Cylinder

D-G

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Support Guide/11-LEFG Series

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

C76

D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A79W Bore B A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5

C76

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL