Guide Cylinder Series MGG

9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175 105 186 170 19 19 M8 x 1.25 depth 16 12 9 150 134 152 90 56 152 115 103 55 194 50 M10 200 115 210 190

4/5 Port Air Operated Valve Series SYJA3000

(110) Double Closed 1.9 0.48 0.46 0.57 2.1 0.36 center Base mounted (With sub-plate) 1/8 Note 1) M5 x 0.8 SYJA740-01 0.36 0.86 3.4 Exhaust 1.2 200 (120) 3 position 0.35 0.48 [0.57] [0.41] [1.3] center 3.3 0.78 0.43 Pressure 0.45 0.56 2.1 [0.85] [0.25] [0.54] center 170 (90) Single 2.3 0.61 0.35 0.74 2.9 0.41 2 position 190 (110) Double Closed 1.9 0.50 0.44 0.60 2.2 0.46 center 1/4 Note 1

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 3.6 LPM , 3.6 LPM, Max Pressure: 1.4 PSIG / 97 mbar , 1.4 PSIG / 97 mbar, Max Vacuum: 5.6 in HgV / -190 mbar , 5.6 in HgV / -190 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 2.4 LPM , 2.4 LPM, Max Pressure: 1.3 PSIG / 90 mbar , 1.3 PSIG / 90 mbar, Max Vacuum: 5.6 in HgV / -190 mbar , 5.6 in HgV / -190 mbar, Voltage (DC): 3, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 2.1 LPM , 2.1 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 5.6 in HgV / -190 mbar , 5.6 in HgV / -190 mbar, Voltage (DC): 12, DC Motor Type: BLDC, Item Dimensions: Length: 2.72 in / 69 mm Width: 1.26 in / 32 mm Height: 1.26 in / 32 mm , Length: 2.72 in

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 2.6 LPM , 2.6 LPM, Max Pressure: 1.1 PSIG / 76 mbar , 1.1 PSIG / 76 mbar, Max Vacuum: 5.6 in HgV / -190 mbar , 5.6 in HgV / -190 mbar, Voltage (DC): 6, DC Motor Type: Standard, Item Dimensions: Length: 2.17 in / 55 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.17

C95Series

.~ 76 O , 9" _ ,'' _11 18 1 le5 ", 1270 20' I'"' Rotating angle ~aore slze A" 8" N+'BO+90~ (mm) 3240 25' W 160' Q 5063 40' 50' 190' SO.I00 30' SS' 175 Series C95 MounUng Accessories Part number ~ ~odel Pescriptlon C951132 C95~ I C951150 csSlI63 l C951180 C95i!

Tie-rod Type Hydraulic Cylinder

LT 45 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 23 10 60 17.5 M8 x 1.25 18 77 20 M14 x 1.5 10 60 44 18 9.5 9 30 25 47 22 14 8 160 44 50 19 50 88.5 25 9 73 17 M10 x 1.5 20 22 M16 x 1.5 12 73 53 20 13 11 30 28 52 26 17 10 172 53 63 21 55 95 28 8 80 17 M10 x 1.5 22 25 M18 x 1.5 12 80 60 22.4 13 11 30 30 55 26 17 10 190

Compact Hydraulic Cylinder

) x 80L 80 105 x 105L -20D (M) -20D (M) x 85L 85 110 x 110L -25D (M) -25D (M) x 90L 90 115 x 115L -30D (M) -30D (M) x 95L 95 120 x 120L 7 -35D (M) -35D (M) x 100L 100 14.5 125 x 125L -40D (M) -40D (M) x 105L 105 130 x 130L -45D (M) -45D (M) x 110L 110 135 x 135L -50D (M) -50D (M) x 115L 115 140 x 140L -75D (M) -75D (M) x 140L 140 165 x 165L -100D (M) -100D (M) CHQB100-10D (M) x 165L 165 190

39

Maximum Clamping Moment Unit: Nm Bore size (mm) Max. clamping moment 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.8 MPa 550 50 100 130 160 190 220 250 63 300 350 400 450 500 Cylinder Stroke Unit: mm Bore size (mm) Arm opening angle 15 30 45 60 75 90 105 120 135 50 22.7 31.9 39.7 47.2 54.8 62.7 70.4 77.2 82.1 63 24.2 34.2 42.6 50.6 58.7 66.9 74.8 81.6 86.4 5 Series CKZ3N Dimensions Pivot point

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8) GA HA 5H9 ( ) depth 5 +0.030 0 6 NN x M6 x 1 thread depth 12 A B 1.5 29 11 11 5.1 5.1 9.5 A B 26 10.5 26 10.5 H G (NN 1) x H B-B A-A (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190

CL

Without rod boot Z 190 207 214 241 With rod boot ZZ 211 228 238 269 Bore size (mm) Z 210 229 236 261 ZZ 231 250 260 289 20 25 32 40 9-2-31 Series CLG1 Basic Style with Air Cushion: CLG1BA Refer to page 9-2-31 for mounting bracket, since the dimensions except GA, P , WA, WB, WH, WW, W are the same.

CV/MVGQ

0 0.039 With Rod Boot 20l h B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 12.5 68 30 36 17 81 93 106 131 156 25 37.5 50 75 100 185 12.5 125 32 36 17 72 85 97 110 135 160 25 37.5 50 75 100 12.5 185 125 17 72 32 36 85 97 110 135 160 25 37.5 50 75 100 190

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 1417 A VK300 Series Specific Product Precautions Be sure to read this before handling the products.

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 120 160 170 170 180 200 200 200 190 Basic VZM450-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM450-01-01 VZM450-01-01S Hard steel roller VZM450-01-02 VZM450-01-02S Polyacetal roller Hard steel roller One way roller lever Straight plunger VZM450-01-05 Polyacetal

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:

CV/MVGQ

With Rod Boot 20l h f B3 e Bore size (mm) 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Data 20 25 32 40 68 12.5 17 30 36 81 93 106 131 156 25 37.5 50 75 100 72 12.5 17 185 125 32 36 85 97 110 135 160 25 37.5 50 75 100 72 12.5 17 185 125 32 85 97 110 135 160 25 37.5 50 75 100 36 77 12.5 19 190

C85

100)} 105(108.5) {115(118.5)} 111(114.5) {121(124.5)} 126.5(130) {147(150.5)} 142(145.5) {173(176.5)} 91(94.5) {101(104.5)} 98(101.5) {108(111.5)} 12 50(53.5){60(63.5)} 75(78.5){85(88.5)} 71.5(75) {92(95.5)} 87(90.5) {118(121.5)} 82(85.5) {92(95.5)} 97.5(101) {118(121.5)} 113(116.5) {144(147.5)} 113.5(117) {134(137.5)} 129(132.5) {160(163.5)} 16 56(59.5){66(69.5)} 20 112 137 145 170 165 190