I

E U N I T T Y P E D I M E N S I O N S S I N G L E U N I T: DIN R A I L M O U N T No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

Hydraulic

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Magnet: None, Mounting: B (Basic), Bore Size: 125mm, Port Thread: Rc, Stroke: 175mm

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

MNB

Model Non-lube type Fluid Air Proof pressure 1.5MPa {15.3kgf/cm} JIS symbol Cylinder with brake Maximum operating pressure 1.0MPa {10.2kgf/cm} Minimum operating pressure 0.08MPa {0.82kgf/cm} Piston speed 50 to 1000mm/s Note) Without auto switch : -10C to 70C (without freezing) With auto switch : -10C to 70C (without freezing) Ambient and fluid temperature Cushion Double side air cushion to 250

Stability of suction position,

60.2 55.2 95.3 ZP3E-80BMl-P 91.3 86.3 126 406 Pad Unit ZP3E Series Pad diameter 100, 125 Pad form Bellows type with groove Dimensions: Pad Unit ZP3E-100BMlZP3E-125BMl71 80 88 58 65 73 (Plate) 16.3 (Plate) 16.3 25 8 3 22 3 8 60 50.5 106 100 71.5 24 133 125 90.3 24 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-100BMl 125 114 197 ZP3E-100BMl-P 186 175

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

, 200, 250, 300, 350 40, 50, 63 1in = 25.4mm Manufacture of Intermediate Strokes Spacers installed 5mm spacers are installed in standard stroke cylinders.

ZP

Vacuum Pad for Heavy Duty Material Handling/With Buffer Specifications Pad for heavy duty material handling (150 to 250) Applicable model ZPT/ZPX (With buffer) ZPT ZPX 150, 200, 250 Vertical Lateral Female thread Female thread Series Pad diameter Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

VFS

250 D side U side Exhaust cleaner (Option) D side mounting U side mounting 4-Rc 1 8 n: Stations 2-Rc 3 4 Stations L L1 L2 Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245 263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 9 551 569 10 602 620 ( ): 2(B)/4(A) port Rc 3/4 3-8-96 97 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS5000 Plug-in type,

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

SMC Pneumatic Clean Series

When replacing the rod seal, take care that the snap ring does not spring out while you are removing it. 175 Actuator / Common Precautions 1 Be sure to read before handling. Refer to the main text for precautions for each series. Precaution on designing Selection Warning Warning 1.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1S3031SC-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model 26.6 40.2 25.8 Pitching Rolling Yawing LJ1S30 300 a = 500 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000

Electric Actuators

Mitsubishi Electric Rolled ball screw 100W 0.05 guide Corporation Ground ball screw 100W 0.02 1 5 Yaskawa Electric 250 Corporation Rolled ball screw 100W 0.05 Ground ball screw 200W 0.02 20 500 Rolled ball screw 200W 0.05 Low Profile Single Axis Electric Actuator Series LG1 (AC Servomotor) Work Maximum Positioning Clean Dust Guide type Motor type Lead screw load speed Series Capacity

Magnet: None, Mounting: B (Basic), Bore Size: 250 (2 1/2"), Stroke A: 0400 (4"), Cushion A: Both Ends, Rod Boot A: None, Stroke B: 1000 (10"), Cushion B: Both Ends, Rod Boot B: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Dual, Tandem Option: XC11 (Dual Op., Sgl. Rod)