Electric Actuator Triple Axis P&P Unit

105 110 18 110 (T-slot pitch) 10 Stroke+300 60 61 (Refer to 6) 170 18 11.5 45 10 4.5 9.4 T-slot dimension 110 (T-slot pitch) The drawing is an example of the left side mount type. 1) When the entire base of the electric actuator (X axis) must be supported, use dedicated T nuts provided by P/A.

CHKD/CHKG

115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135 140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

MG

Copper-free (For CRT manufacturing process) A Over 50 st to 100 st 110 110 125 125 Bore size (mm) To prevent the influence of copper ions or halogen ions during CRT manufacturing processes, copper and fluorine materials are not used in the component parts.

Modular F.R.L. Unit

220 77.5 80 50 40 18 9 88 35 3 226 9 4.6 74 187 38 110 235 93 96 70 50 3.3 20 11 11 6.4 115 84 44.5 303 264 43 110 282 98 96 70 50 3.3 318 20 11 11 6.4 117.5 84 44.5 279 45 110 292 98 101 70 50 3.3 318 20 11 117.5 44.5 11 6.4 84 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Best Pneumatics Vol. 14

220 77.5 80 50 40 18 9 88 35 3 9 4.6 74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Electric Actuator/Slider Type

Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K [mm] LEYG L (Ball bushing bearing) [mm] LEYG M (Sliding bearing) X Size Stroke range (mm) L DB Size Stroke range (mm) L DB 25 15 to 110 91 10 115 to 190 115 195 to 300 133 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 (0.5) Section XX Z WB WA 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 32

Modular F.R.L. Units

33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC60-B 1 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications Metal

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

Aluminum High Vacuum Angle Valve

0 CE-compliant CE-compliant y Rated voltage u Electrical entry i Light/Surge voltage suppressor 1 100 VAC, 50/60 Hz Q CE-compliant Nil Nil S Z G H L M None With surge voltage suppressor With light/surge voltage suppressor Grommet (Lead wire length 300 mm) Grommet (Lead wire length 600 mm) L type plug connector M type plug connector 2 200 VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50

CL

110 120 263 258 307 300 327 319 379.5 402.5 382 405 419 440 Note) Bore size 40 and bore sizes 125 through 160 with auto switch are not available. 9-3-11

VZ100/300/500

N.O. 110 1/8 2.8 2.7 2.9 2.8 3.0 2.7 0.43 0.38 0.32 0.21 0.31 0.31 0.77 0.72 0.71 0.71 0.74 0.68 2.5 2.4 2.7 2.3 2.6 2.3 0.51 0.42 0.34 0.45 0.33 0.48 0.76 0.69 0.69 0.63 0.66 0.64 Body ported 160 (Without sub-plate: 110) 1/8 Base mounted (With sub-plate) 1/4 Note) Weight stands for grommet type. Option Description Foot bracket Part no.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Proposals for Energy Saving

VP542-D Series VP500 VP544-G Grommet (G), Grommet terminal (E), Conduit terminal (T), DIN terminal (D) 100, 200, 12, 24, 48, 110 to 120, 220, 240 Note 1) Electrical entry VP742-T Series VP700 DC AC (50/60Hz) Rated coil voltage V VP744-E 24, 6, 12, 48, 100, 110 Note 1) 15% to +10% of rated voltage 5.6 (50Hz), 5.0 (60Hz) 3.4 (50Hz), 2.3 (60Hz) 1.8 or 2 (with indicator light) Power consumption

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 View A 100 46 30 2 14 IP8000-01 (With terminal box) OUT2.Rc1/4 With plug 110 38 192 218 23.5 110 40 35 OUT1.Rc1/4 SUP.Rc1/4 2 x M8 x 1.25 depth12 (Female thread for side mounting) 43 23.5 58 38 39 11 9 39 OUT2 MPa 42 162 117 16 6.1 MPa 20 50 65 A 122 ELECTORO PNEUMATIC IP8000 P O S I T I O N E R 22.5 125 At accessory E: 110 At accessory F: 110 { } 5 150 125 12 168 8

Compact Hydraulic Cylinder

130L -45D (M) -45D (M) x 110L 110 135 x 135L -50D (M) -50D (M) x 115L 115 140 x 140L -75D (M) -75D (M) x 140L 140 165 x 165L -100D (M) -100D (M) CHQB100-10D (M) x 165L 165 190 x 190L CHQB40-5D (M) CQ-M5 x 75L 75 CQ-M10 x 105L 105 -15D (M) -10D (M) x 80L 80 x 110L 110 -20D (M) -15D (M) x 85L 85 x 115L 115 -25D (M) -20D (M) x 90L 90 x 120L 120 -30D (M) -25D (M) x 95L 95 x 125L 125 -35D (M)

0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Soft Start-up Valve

VAC 100 VN SY100-82-2-01 200 VAC 200 VN SY100-82-2-02 110 VAC (115 VAC) 110 VN SY100-82-2-03 220 VAC (230 VAC) 220 VN SY100-82-2-04 When making connections, please note that using other than the supported size (3.5 to 7) heavy-duty cord will not satisfy IP65 (enclosure) standards.

VZS

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

Pin Clamp Cylinders

Guide Pin Diameter Symbol 075 076 077 078 079 080 085 086 087 088 089 090 095 096 097 098 099 100 105 106 107 108 109 110 Guide pin diameter [mm] 7.5 7.6 7.7 7.8 7.9 8.0 8.5 8.6 8.7 8.8 8.9 9.0 9.5 9.6 9.7 9.8 9.9 10.0 10.5 10.6 10.7 10.8 10.9 11.0 Applicable hole diameter of workpiece [mm] For 8 For 9 For 10 For 11 Guide pin shape Round type Round type/Diamond type Symbol 115 116 117 118