(standard), Port thread type: Rc, Auto Switches: M9B, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: Rc, Auto Switches: M9B, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: Rc, Auto Switches: M9B, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Bore Size: 25mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Bore Size: 20mm, Symmetric Type: L (Symmetric), Stroke: 40mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Rotary Actuator/Vane Type

steel Size 40 only e y u MSQ o w MSZ !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Smooth Cylinder/Low Speed Cylinder

0 0.033 0 0.039 Boss-cut Style (mm) (mm) ZZ 103 107 109 138 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 D-X 1195 Series CM2Y Head Side Trunnion Style (T) CM2YT Bore size Stroke Effective thread length 2 x FL 0.025 0.061 TDe9 Width across flats B2 G 2 x P (Rc,

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

Made to Order

25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 9-15-78

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64