(standard), Port thread type: M Screw, Auto Switches: M9P, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: M Screw, Auto Switches: M9P, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: Rc, Auto Switches: M9P, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.1 to 1.0, Specification: Built-in magnet, Support bracket: Through-hole

(standard), Port thread type: Rc, Auto Switches: M9P, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø32 mm, Port Thread: TN [NPT (ø32-ø100)], Stroke: 40 mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 6mm, Stroke: 40mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bearing: L (Ball Bushing), Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 40mm, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Bore Size: 20mm, Port Thread Type: TN (NPT), Adjuster Position Set: Right Side, Stroke: 40mm, Adjuster: w/o Adjuster, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 0.5M

1

VM SUP blocking disk assembly SY30M-40-2A SY50M-40-1A SY70M-40-1A EXH blocking disk assembly Series SY3000 SY5000 SY7000 SY30M-40-1A SY50M-40-1A SY70M-40-1A XT34 Label for blocking disk If the blocking disk assembly is ordered using the manifold specification sheet and ordered at the same time as the manifold, the position where the blocking disk assembly is inserted will be labeled and

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Table of Contents

60 30 60 80 40 80 100 50 100 120 70 120 160 100 160 200 60 10 40 MHC 60 MHT 16 40 MHY 60 MHW 20 40 MRHQ 60 25 Misc. 40 30 D32 20 2030 40 P . 12-4-7 20 Note) The open and close time spans represent the value when the exterior of the workpiece is being held.

Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Table of Contents

bearing CY1S6 to 40 !

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

x 1.5 Up to 700 1/8 146 9 10 40 40 60 196 206 20 42.5 40 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 209 219 22 40 51 M32 x 2 53 Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

Smooth Cylinder/Low Speed Cylinder

0 0.033 0 0.039 Boss-cut Style (mm) (mm) ZZ 103 107 109 138 S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32 40 D-X 1195 Series CM2Y Head Side Trunnion Style (T) CM2YT Bore size Stroke Effective thread length 2 x FL 0.025 0.061 TDe9 Width across flats B2 G 2 x P (Rc,

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.