Bearing Style: M (Slide Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 20mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (vacuum type), Port thread type:

CQS

, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series

Possible to transfer a workpiece at low-speed.

Description 10 20 30 50 DSeal kit P523010-20 P523020-20 P523030-20 P523040-20 No. Description Qty. No. Description Qty. No. Description Qty. No.

MXQ

MXQ16-20 MXQ16-20 MXQ16-20 MXQ16-20 D0.02 0.04 MXQ16-10 MXQ16-10 MXQ16-10 0.01 MXQ16-10 MXQ16-10 -X 0 0 400 100 200 300 150 150 50 100 200 50 100 200 0 20Load (N) Load (N) Load (N) Data 20 20 20 Lr = 160 mm 0.08 MXQ20-125 MXQ20-150 MXQ20-125 MXQ20-125 MXQ20-10 MXQ20-10 MXQ20-20 MXQ20-20 MXQ20-30 MXQ20-30 MXQ20-10 MXQ20-20 MXQ20-30 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-75 MXQ20-40 0.12 MXQ20-40

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Rod Return/Extend Single Rod Accessories . 5 Long stroke 12 16 20 Double Acting Single Acting Double Acting 35, 40, 45, 50, 75, 100 75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 Construction . 6 25 Dimensions . 7 & 8 Reed switch D-A90, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod 12 16 5, 10, 15, 20 25, 30 How to Order . 1 Construction . 9 20 25 5, 10

Cylinder with Lock

no. a (Max.) b c (Min.) d e f H9 (Hole) f h11 (Shaft) l1 32 GKM10-20 20 10+0.5 +0.15 20 40 M10 x 1.25 10 10 52 40 GKM12-24 24 12+0.5 +0.15 24 48 M12 x 1.25 12 12 62 50, 63 GKM16-32 32 16+0.5 +0.15 32 64 M16 x 1.5 16 16 83 80, 100 GKM20-40 40 20+0.5 +0.15 40 80 M20 x 1.5 20 20 105 * Supplied with clevis pin and clevis pin bracket Rod end: KJ (ISO 8139) l l3 [mm] Bore size Part no. b1 h12

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Power Cylinder Series MGZR 20, 25, 32, 40, 50, 63, 80 Non-rotating Double Power Cylinder Series MGZ 20, 25, 32, 40, 50, 63, 80 Double extension output power (without non-rotating mechanism) 20 are 20 are and 25 sizes newly added. and 25 sizes newly added.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

CLQ

Through holes Double end taps Extension locking Easy manual unlocking B Locked A 40 to 100 20 to 32 W Retraction locking Unlocked 40 to 100 20 to 32 W A B Wide variations from 20 to 100 Standard stroke (mm) Locking direction Bore size (mm) Mounting Series 5 10 15 20 25 30 35 40 45 50 75 100 20 Through holes, double end taps common 25 Extension locking 32 40 CLQ Through holes 50 Retraction

CE

20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

CE

20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

Stroke Reading Cylinder and Counter

VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N