Modular Design with Uniform Body Style

[AF/AFM] 0.1 MPa Set pressure range [AR] 0.05 to 0.85 MPa Max. flow capacity*3 [AFM] 200 L/min (ANR) 450 L/min (ANR) 1100 L/min (ANR) Nominal filtration rating*4 [AF] 5 m [AFM] 0.3 m (99.9% filtered particle size) Outlet side oil mist concentration*5, *6 [AFM] Max. 1.0 mg/m3 ( 0.8 ppm) Compressed air purity class*7 ISO 8573-1:2010 [ 3 : 4 : 3 ]*8 Drain capacity [AF/AFM] 8 cm3 25 cm3 45 cm3

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375 387.5 400 412.5 437.5 450

Series AK1000

to 0.4 MPa) AK1310 2 to 100 psig (0.014 to 0.7 MPa) AK1315 5 to 150 psig (0.034 to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Mass Select compatible materials of construction for the gas Vacuum to 300 psig (2.1 MPa) 450

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 2.6 LPM , 2.6 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 13.3 in HgV / -450 mbar , 13.3 in HgV / -450 mbar, Voltage (DC): 6, DC Motor Type: Standard, Item Dimensions: Length: 2.83 in / 72 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.83

CM2

1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 450 2000 CS1 Order Made 40 500 2000 Made to Order Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

25 25, 50, 75, 100, 125, 150 200, 250, 300 450 32 500 40 Note 1) Any intermediate stroke that is not indicated above will be produced on order.

CYV

excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450

Table of Contents

Auto switch mounting groove (4 locations) (Finger closing port) (Finger closing port) Rc 1/8 Rc 1/8 D(Rack screw) 2-M10 x 1.5 20Width across flats 17 (2 locations) Width across flats 19 (2 locations) (Piston rod and rack screw) 2-M12 x 1.75 Closed E Open F 4-M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 336 450 Note 1) J dimension is at fully closed.

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 22 36 110 180 544 612 873

Modular F.R.L. Unit

AF30 AF20 AF30 Mist separator AFM40 AFM40-06 AFM30 AFM20 AFM30 Component Regulator AR40 1/4 3/8 1/2 1/4 AR40-06 AR25 AR20 AR30 1/4 1/8 1/4 3/4 Port sizes 3/8 1/4 3/8 Note 1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid Proof pressure Maximum operating pressure 1.5MPa 1.0MPa 0.05MPa Minimum operating pressure Set pressure range 0.05 to 0.85MPa Note 2) 1100 Rated flow L/min (ANR) 1100 450

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Rodless Cylinder for Vacuum Series CYV ø15, ø32

excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Regulator for 2 MPa ARX 20

500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate 60l/min (ANR) Conditions: Upstream pressure 2.0MPa Downstream pressure 0.3MPa Flow rate 60l/min (ANR) ARX20 ARX21 0.89 0.88 0.37 0.36 Downstream pressure MPa Downstream pressure MPa 0.87 0.35 0.86 0.34

Series LC7R Dedicated Regenerative Absorption Unit

Actuator rating Maximum work piece load: 5kg Maximum speed: 600mm/s Maximum stroke: 500mm Maximum work piece load: 8kg Maximum speed: 500mm/s Maximum stroke: 600mm Series LJ1H30 LJ1H3031A-K (10mm lead) 500 When an actuator is operated under conditions that exceed the lines on the graph to the left, be sure to use a regenerative absorption unit. 450 400 8kg 350 Example) A Speed (mm/s) 300

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Mounting bracket for holder Standard stroke (mm) Model Bore (mm) Manufacturable max. stroke (mm) 100 200 300 400 500 600 700 800 900 1000 1200 1400 1600 1800 2000 MY3A/3B 3000 16, 25, 40, 63 CAT.S20-153 English cat.no.ES20-153 Mechanical Joint Rodless Cylinder/Compact and Low Profile Series MY2H/HT Series MY2H/HT Standard stroke (mm) Bore (mm) Model Guide 50 100 150 200 250 300 350 400 450