Slider Type Ball Screw Drive/11-LEFS Series

servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410

Environment

servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410

Air Slide Table

Reduction of the shorter Additional weight of adjuster option Extra for option 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Buffer End lock Axial piping MXQ6A 61 66 80 89 97 6 10 8 30 10 total length type MXQ8A 68 76 85 97 116 138 6 10 8 30 10 MXQ12A 143 154 168 192 206 263 300 12 20 16 70 20 MXQ16A 240 257 277 309 329 389 469 520 21 40 30 120 35 MXQ20A 408 410

Max Operating Pressure: 3.5 MPa, Construction: Element Upward Removal, Threaded, Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: Differential Press. Indicator, Construction 42 Only, Relief Valve: None, Fluid: Petroleum, Element: Micromesh, Filtration: 20μm, Fluid Direction: IN Left, Made to Order: Non-standard Filtration

Max Operating Pressure: 3.5 MPa, Construction: Element Upward Removal, Threaded, Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: Differential Press. Indicator, Construction 42 Only, Relief Valve: None, Fluid: Petroleum, Element: Paper, Filtration: 5μm, Fluid Direction: -, Made to Order: -

Max Operating Pressure: 3.5 MPa, Construction: Element Upward Removal, Threaded, Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: Differential Press. Indicator, Construction 42 Only, Relief Valve: None, Fluid: Petroleum, Element: Micromesh, Filtration: 3μm, Fluid Direction: IN Left, Made to Order: Non-standard Filtration

Construction: Common w/L-type Thread & Flange, Port Size: 3/4, Pressure Indicator: Differential Pressure Indicator, Relief Valve: None, Fluid: Petroleum, Filtration: 105μm, Flange: -

Type: -, Type: Line filter, Hydraulic fluid: Petroleum series, Connection Port Size: 3/4B, Nominal filtration(μm): 20, Differential pressure display: Differential pressure indicator, Relief valve: N/A, O-ring nominal size: N/A, Structure / connection method: Screw-in, Operating pressure (max.)(MPa): 3.5, Element: Paper, Flow Direction: IN left, Made-to-order specifications: None (standard

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 20μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 5μm

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: P (Paper), Filtration: 20μm

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 3μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Construction: 90 (Common w/L-type Thread & Flange), Port Size: 06 (3/4), Pressure Indicator: 4 (Differential Pressure Indicator), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Filtration: 105μm

Max Operating Pressure: 3 (3.5 MPa), Construction: 42 (Element Upward Removal, Threaded), Port Size: 06 [3/4 Threaded, 20 (3/4) Flange SSA], Pressure Indicator: 4 (Differential Press. Indicator, Construction 42 Only), Relief Valve: 1 (None), Fluid: 0 (Petroleum), Element: M (Micromesh), Filtration: 10μm, Fluid Direction: IN Left, Made to Order: X0 (Non-standard Filtration)

Compact Hydraulic Cylinder

4535 6802 9070 11337 13605 15872 4535 OUT 7853 11779 15706 19632 23559 27485 7853 100 30 IN 7147 10720 14294 17867 21441 25014 7147 Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight Unit: g Male thread additional weight 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 180 200 220 240 260 280 300 320 340 360 10 610 710 330 350 370 390 410

3 Port Air Operated Valve

N.O. 20.5 NC 12 41.1 3R 1P 91 83 33 60 83 61.3 91 41.1 12 NO 3/8 1(P), 3(R) port 1/8 (Pitch) P = 33 12(PA) port 31 M5 x 0.8 (Breathing hole) L1 L2 7.5 (Station n) (Station 1) 1/8 12(PA) port 12 93.5 70 13.5 47.5 2A 2A 3/8 2(A) port (Pitch) P = 33 31 2 stations 95 80 128 113 161 146 194 179 227 212 260 245 293 278 326 311 359 344 392 377 425 410 458 443 491 476 524 509 557 542 590 575 623

VXA31/32

280 1.0 1.5 (8A) 1 4 3 4 2.2 3 4 410 (10A) 3 8 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm

LEKF-OMZ0035

Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310 1410 940 470 Stroke 701 to 800 550 330 160 750 500 250 1140 760 380 Speed [mm/s] Note2) range 801 to 900 610 410