Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type of actuation Series Port size 1 2 5 7 Normally closed Normally open M5 01 10-SYJ500 10-SYJ700 3 port M5 x 0.8 1/8 (SYJ700 only) (For type 20 manifold) 1 5 10 SYJ 2M 5 Y M5 Body ported 5 1 4M 5 Y 01 10 SYJ Base mounted Clean series 3 port Port size For sub-plate type, types 40 and 41 manifolds Thread type Electrical entry F Nil Y: With connector Rc Nil Without sub-plate G N T NPT NPTF

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Free Mount Cylinder

40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46

TABLE OF CONTENTS

Housing J Yoke For Leads Y Non-molded coil or Molded Mounting Bracket B Series 20 E.P.

CE

y @7@4 @8@0oi@3 @8 !

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ro 40mm cn y q c k r l o B e .

CRQ2

Applicable shaft type: W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) Y 3 to 9 3 to10 L2 6 (9 Y) to Y 7 (10 Y) to Y L4 max Y Y Size 10 15 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X 2 X 2 Size 10 15 Symbol :: A14 Symbol :: A15 Symbol

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Digital Flow Switches

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

Table of Contents

(Except C kit) F, P, T and S kits are provided with an exhaust on one side, while C kits are with an exhaust on both sides. The number of max. stations differs from kit to kit. (Refer to the table below.)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

MQQ

Dimensions Foot type/MQMLL 6 25 14 33 42 18.5 6 9 2.3 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y 4-LC S + Stroke LS + Stroke ZZ + Stroke LX LZ Z LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 5.5 83 2.3 14 33 25 65 19 42 108 9 6 10 5.5 92 2.3 18 42 30 74 21 54 119 9 6 16 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 20 6.8 142.5 3.2 28 40 47 102.5 24.5

240

1.0 6.0 3.0 Compact 4.0 2.0 Work load [kg] Note 2) Note 3) Note 6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Actuator specifications Horizontal Basic 10 to 150 20 to 300 Note 4) 10 to 200 20 to 350 Note 4) Compact 10 to 200 20 to 350 Note 4) Speed [mm/s] Note 3) Note 6) Vertical Basic 10 to 150 20 to 300 Note 4) 10 to 150 20 to 300 Note 4) Compact 10 to 150 20 to 300 Note 4

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

an M5 female thread is used.)

ZX

Operation stop Combination Symbol: D1 Combination Symbol: D4 An N.C. solenoid valve is used for the vacuum release valve. An external supply valve must be provided. An external valve must be provided to serve as the supply valve. An air operated N.C. valve is used for the vacuum release valve.

ISO Cylinder

axial port Boss-cut/Basic [mm] Dimensions Bore size AM B C EE G1 G2 H K KK L LD LH LX N1 N2 NA ND S SW (WH) (XB) ZZ 20 20 30.3 8 G 1/8 22 8 30 6 M8 x 1.25 33.5 5.5, 9.5 counterbore depth 6.5 15 21 29 15 24 20 0 0.033 76 13 10 22 106 25 22 36.6 10 G 1/8 22 8 36 8 M10 x 1.25 39 6.6, 11 counterbore depth 7.5 18 25 29 15 30 26 0 0.033 79 17 14 26 115 Front side mounting: Cl85RBF/Y B 20/25 Stroke

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Holes vns 20/30/40/50 Cornbination with a ,noduta. sayle FBL :;t.ti:l Combination with a modular style AC20 Ac:t0 VHS2O VHS3O VHS4O VHS5O An nterface pad is required attached 1o a modular FRL.

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

CNA

M22 x 1.5 Polished round 18 A1 U1 L1 4 x 25l +0.3 +0.1 30 Y-10C 100 37 40 83 21 38 20 61 83 M26 x 1.5 Polished round 20 RR1 Knuckle pin, cotter pin and flat washer are attached.

CNA

18 55 76.5 Polished round 18 A1 U1 L1 4 x 25l +0.3 +0.1 30 100 Y-10C 37 M26 x 1.5 40 83 21 38 20 61 83 Polished round 20 RR1 Knuckle pin, cotter pin and flat washer are attached.