0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

RSQ

w/ Onetouch fittings are 20 to 50.

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Nil 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm For R and U, DC voltage is only available. Power saving circuit is only available in the Z type. 3 220 VAC50/60Hz [230 VAC50/60Hz] 4 How to Order M8 Connector Cable For type W, DC voltage is only available.

LEC-OM07605CN

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECSS2-T5 LECSS2-T7 LECSS2-T8 LECSS2-T9 () 5.9m/s2 XY49m/s2 (2) (FR-BIF) (UVW), A 5 (UVW)(UVW) U U U U V V M V M V W W W W DC DC 24 V DC 24 V DOCOM DOCOM RA RA U,V,WCN2 (3) (4) A 6 () (5) DC24V ALM()MBR( ) RA B U DC 24 V (6) 10 (7) A 7 () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , [](:) EEP-ROM

LEC-OM02704CN

(1) 055() 0+40() -20+65() -15+70() 90RH() 80RH() 90RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 A 5 (2) (FR-BIF-(H) ) (UVW) (UVW)(UVW) U U U U V V M V M V W W W W DC (EMG) DC24V DC24V DOCOM DOCOM DICOM DICOM RA RA A 6 (3) (4) () (5) (EMG) EMG ON(Ryn0)OFF ALM MBR (RYn0)OFF(ALM) (MBR) (EMG) EMG RA DC24V A 7 (6) 10 (7) () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3)

%silltr

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

SMC Basic Pneumatics

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

LEC-OM02904

U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

Air Slide Table

125 Made to Order Page 127 Model Selection Page 157 Specific Product Precautions Page 195 Safety Instructions Back Cover 10 Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQmA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40,

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Table of Contents

F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No. VVQ1000-57A-3 2 pcs. per one 16 16 24 18 24 16 stations 16 stations 16 stations 14 14 8 Max. points When ordering DIN rail only Negative Common Specifications DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.

ZP

114.6 202.6 ZPR25D50-0-A10 Dimensions by Stroke One-touch Fitting 20, 25 32 J Model G H G H Model K L M U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPR 10-0-A10 ZPR-04-A10 68.6 23 102.6 69.1 103.1 4 10.4 23.3 ZPR-06-A10 78.6 140.6 79.1 141.1 6 12.8 24.3 51 8 15.2 26.2 ZPR-08-A10 88.6 150.6 89.1 151.1 98.6 186.6 99.1 187.1 77 108.6 196.6 109.6 197.1 13-11-40 41

Air Cylinder

0 t u !4 q e o !3 r w i !2 y u 20 to 32 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1KWN20Z-PS Set of the nos. !1, !2, !3, !4 No.