7

terminal d e 34 C (U2) (V2) E VX2 VXK 32 T 1.2 7.5 VXD VXD 25 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

JIS Standard Hydraulic Cylinder

x 0.8 K B +0.1 0 40 31.5 145 115 45 60 M24 x 1.5 40 30 M6 x 1.0 C-series A CHS +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 30 M6 x 1.0 +0.1 0 50 40 185 145 57 79 M39 x 1.5 63 40 M8 x 1.25 CH2 CH2 Double knuckle joint CHA Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D d K L L1 E Part no.

Vacuum Unit

2 p. 31 ZK2 VA A A A K 5 L ZK2 FC A Port for the pressure switch or sensor q w e r t Symbol Port for the pressure switch or sensor Filter case color P With port (type with pressure switch or sensor) Smoke T Without port (type without pressure switch or sensor) Clear q Applicable system w Valve type e Rated voltage A Ejector system K Supply valve: N.C., Release valve: N.C. 5 24 VDC 6 12 VDC

VQZ1000/2000/3000

A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

IDG

Note 1) Symbol P is only applicable for Type M with either auto-drain or drain-guide. Type V is not applicable because it is equipped with a relief type regulator. (Symbol P is used when it is undesirable for the air to be discharged into the main body of IDG.

AC

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series. Selection Warning qDo not use it between the cylinder and the switching valve. To prevent a lag in the discharge time, use a regulator with a check valve.

JXCx-OMU0004

P.16 5. CN1P.17 PLC 6. CN4I/O P.20 4. P.16 6.4 I/O P.23 12. P.65 ONOFF 2.2 P.7 OFF OFF OFFLED ON STOP ON OFF 79 No.JXC-OMU0004-A 12. P.65 4. P.16 6.4 I/O P.23 3.4 P.14 3.1 P.11 CP.38 2.2 P.7 ALARM ON STOP ON OFF 10 ALARM ALARM ON ON 80 No.JXC-OMU0004-A 16.2 () 2.2 P.7 4.

Series IDG

75 100 50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard equipment Note) In case of two or more options, indicate them in alphabetical order.

Aluminum High Vacuum Angle Valve

DBellows seal P.448 to P.453 10-6 to atmospheric pressure Single acting (N.C.) 10-10 10-11 XSA XLDV (With solenoid valves) O-ring seal Prevents a pump from running overloaded. XVD Standard XGT XLH CYV 10-6 to atmospheric pressure P.454 P.455 Particle free cleaned Bellows seal 10-10 10-11 Standard Standard Manual (Size 16: None) XLS P.456 to P.458 Single acting (N.C.)

Prevents Micro-Bubbles

PA A B Suck back (single type) Suck back (unit type) P P P A A B B With indicator Description Material Parts list No.

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Inclined Operation (At a right angle to operating direction) 25 60 32 105 40 200 Bore size (mm) Allowable load weight (WA) (kg) Data 3.4 + Lo 4.2 + Lo 5.1 + Lo 8.

CL

If the lock is applied at a desired position of a stroke and compressed air is applied to only one side of the cylinder, the piston will lurch at a high speed the moment the lock is disengaged. In such a situation, there is a risk of injury to humans, or equipment damage. To prevent the piston from lurching, use a balance circuit such as the recommended pneumatic circuit (P . 9-2-6).

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

CRB2/CRBU2/CRB1

QCR: When the internal volume of a rotary actuator varies depending on the A and B ports, use formula (1). P + 0.1 0.1 QCR = V x x 10-. Formula (1) P + 0.1 0.1 Formula QC2 = QC x n x Number of actuators x Reserve factor . Formula (5) QCR = 2V x x 10-. Formula (2) P 0.1 QCP = 2 x a x L x x 10-.

Table of Contents

(Rotating range of single flat (key) when mounting 2 pcs. stopper blocks on the other sides groove is the opposite side from

Electric Actuator with Integrated Guide

Transfer load m (kg) 200 L3 (mm) 100 a=1000 a=2000 a=3000 a L3 Mey 6 4 2 0 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me : Allowable dynamic moment L : Overhang to work piece center of gravity (mm) Refer to page 71 for deflection data. 56 60 Non-standard Motor/Vertical Mount Specification Series LTF6 Dimensions/LTF6ENH(X10) Scale: 20% 50 30 thread depth

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Rotating range of single flat (key) when mounting 2 pcs. stopper blocks on the other sides groove is the opposite side from

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Rotating range of single flat (key) when mounting 2 pcs. stopper blocks on the other sides groove is the opposite side from