7.5

Manifold Electrical Wiring P.28 Dimensions P.29 EX180 Serial Wiring How to Order P.34 Dimensions P.36 EX510 Gateway System Serial Transmission System How to Order Manifold P.42 Dimensions P.44 Manifold Exploded View P.49 How to Add Manifold Stations P.50 Non-plug-in Individual Wiring Manifold Individual Wiring How to Order P.52 Dimensions P.54 Manifold Exploded View P.59 Manifold Options

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

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8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

4/5 Port Air Operated Valve Series SYJA3000

Valve mounting direction Stations 02 Single solenoid coil is on opposite side as the A, B port. 2 stations Nil + + A + + + + + : : R P P R R port M5 x 0.8 R port M5 x 0.8 Single solenoid coil is on same side as the A, B port.

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

P port on both sides and exhaust from EA/EB port on both side.

A

A G E A P P L I C A T I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

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Swivel Elbow KFG2V Metric Inch P. 324 P. 329 Metric Inch P. 325 P. 331 KDM KB KR KA KQG2 Straight Union KFG2H Female Connector KFG2F KG Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 KFG2 KFG2 MS KKA KP LQ Union Tee KFG2T Union Nut KFG2N MQR Metric Inch P. 324 P. 330 Metric Inch P. 326 P. 331 T IDK 321 Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection Thread

One-touch Fittings

P.101 M R G Uni UNF NPT M R Uni Metric size P.5 P.101 P.65 P.173 P.57 P.165 P.87 P.201 P.29 P.133 Inch size P.29 P.133 P.73 P.185 P.49 P.157 P.81 P.195 P.49 P.157 P.95 P.209 CAT.ES50-37D KQ2 Series One-touch Fittings KQ2 Series Compact and lightweight Improved tube insertion/removal Length 23% shorter Max. 1 30% reduction Dimensions Dimensions Insertion : force Height 24% shorter 1 20 15.5

VZ100/300/500

VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

SZ3000

External pilot LOCK FREE LOCK FREE Valve stations F: D-sub connector P: Flat ribbon cable connector (26 pins) Note Note Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications Double wiring specifications (1) 12 02 12 02 12 stations 12 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout (2) (Up to 24

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

V

1 P O R T S I Z E 02 1/4 03 3/8 P R E S S U R E CHARACTERISTICS O P T I O N Nil None B With Bracket G With Gauge PA N E L M O U N T O P T I O N Nil Standard X2 Panel Mount Option Courtesy of Steven Engineering, Inc. !

Flow Control Equipment

Air Flow/Effective Area Model AS12l1FM AS13l1FM AS22l1FM-01 AS23l1FM-01 AS22l1FM-02 AS23l1FM-02 6, 8 Tube O.D.

ZP

P Applicable tubing O.D.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Manifold type CE-compliant Stations P, R port thread type 20 21 Type 20 Type 21 -+ -+ -+ -+ -+ -+ -+ -+ Nil Rc G NPT NPTF 2 stations : 20 stations Nil 02 : 20 R P 00F 00N 00T R P Q CE-compliant P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides