CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

JXCx-OMT0030CN

0 Q_Address 1733 LEC7.1 Q_Address 16 1LEC I_Address .33.11 INPI_Address 15.31 INP LEC6.3 IO Q_Address 16 0I_Address 33.10 INP 33 - 114 LEC IO No (LEC) IO IO (LEC) Q_Address 17 0 Q_Address 1833 LEC*67.1 Q_Address 16 063 Q_Address 17 LEC I_Address .33.11 Q_Address 17 0 I_Address .33.10 34 - 12 121 [IN] I_Address 0 1 2 3 4 5 13 Bit/Byte / I_Address ID No. 0 OUT0 bit

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

E@-M3 inch(mm) $ f grf r, i -, :,,1 i ,t1':-/,r:frt crommet(G).

o

E@-M3 inch(mm) $ f grf r, i -, :,,1 i ,t1':-/,r:frt crommet(G).

o

E@-M3 inch(mm) $ f grf r, i -, :,,1 i ,t1':-/,r:frt crommet(G).

Vacuum Pad

ZP3PA-T2-A12 [Weight: 16 g] M12 x 1.75 24 Gasket 7.3 6.2 13.5 12 2.4 Width across flats 21 Applicable pad part no. ZP3P-35PTSF ZP3P-50PTSF 13 10.7 4 Female Thread Adapter Adapter part no. ZP3PA-T1-B5 [Weight: 3.1 g] Adapter part no.

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.)

LC6D/LC6C

Motor side 16 pulse End side 1 A Parameter no.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Motor side 16 pulse End side 1 A Parameter no.

HRX-OM-W069

Silent interval is indicated by T1-T2-T3-T4. Table 3.8-2 RTU mode message frame a)Start b)Slave Address c)Function d)Data e) Checksum (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

HRX-OM-Z015

Silent interval is indicated by T1-T2-T3-T4. Table 3-6 RTU mode message frame a) Start b) Device Address c) Function d) Data e) Checksum (CRC) f) End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (non-communication time).

DOC1003626

Silent interval is indicated by T1-T2-T3-T4. Table 3.8-2 RTU mode message frame Address c)Function d)Data e)Checksum a)Start b)Device (CRC) f)End T1-T2-T3-T4 XX XX XX XX XX XX T1-T2-T3-T4 a) Start In Modbus RTU mode, message frames are separated by a silent interval (noncommunication time).

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Refer to page 7-6-16.

5

, 8, 12, 16) Note 2) 115 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 1 90 95 110 115 120 2 (Different surfaces, same surface) 100 105 120 125 130 n (Same surface) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 125 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 130 +

Smooth Cylinder/Low Speed Cylinder

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40(n 2) 2 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50, 63/10 to 100 12, 16, 20 25, 32, 40 50, 63 Single rod CQ2K 7-6-62 20Double acting Data 12, 16, 20 25, 32, 40 50, 63 12, 16/5 to 30 20, 40/5 to 50 50, 63/10 to 50 Double rod CQ2KW 7-6-76 Axial Piping (Centralized Piping Type) 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 12, 16, 20, 25 32, 40, 50, 63, 80, 100 Single

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

XM, XY

How to Order XMH XYH 16 25 Angle type In-line type q w e w Flange type XMH q Flange size XMH XYH Symbol Nil C Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Type KF (NW) CF Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 e Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Seal material

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.