TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

r t q w e r t i i o o !

VT307

VV307 01 F V100 Mounting bracket Thread type SY VT307 manifold Nil F N T Rc G NPT NPTF SYJ Manifold valve can be easily converted from N.C.

HRX-OM-X084

Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-M090

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

VK300

Note Bracket VK300-43-2A With screw Body ported VK332 1 G M5 1 G 01 VK334 Base mounted Port size 01 Rc (With sub-plate) Nil Without sub-plate 1 8 Valve option Nil V Standard type For vacuum Light/Surge voltage suppressor Y For low wattage For vacuum/low power consumption Continuous duty type Nil None S With surge voltage suppressor W Z With light/surge voltage suppressor (Type D only) E For

VQ4000

For other kits, order E type control unit.

PSE540/560

42.7 g 49.3 g 41.4 g 41.6 g 43.3 g 44.1 g Weight Without sensor cable 2.9 g 3.2 g 9.8 g 1.9 g 2.1 g 3.8 g 4.6 g 16-3-25 4 Series PSE540 Internal Circuit PSE54 Voltage output type 1 to 5 V Output impedance Approx. 1 k Brown DC (+) Main circuit 1 k Black OUT 10 to 24 VDC + (Analog output) Load Blue DC () Dimensions PSE5R04 R06 PSE54M3 M5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Local Area: (800) 258-9200-www.stevenengineering.com 9 Option Port size M5 x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With

5 Port Solenoid Valve, Series VQC

Refer to e.

LEC-OM02904

(b) 1) Vb[V] 2) (Ib) Ib = Vb R [A] 3) (E) L lb2 E = 2 [J] 4) (Vi) (Ib)(Vi)(E) (Vi)[V](Vs)[V]Vi ViVs 5) () () = E Vi lb [S] 6) ()N (Ip) (Ip)(Ib) Ip/IbN[] (4) 13 3 13. 13.1.2 ( ) () LE--B S5 S6 S7 S8 50W 100W 200W 400W (1) () (4) DC 24 V 0 -10% [W] at 20 6.3 7.9 (6) [] 91.0 73.0 (6) [H] 0.15 0.18 [N m] 0.32 1.3 (2) [s] 0.03 0.03 (2) [s] 0.01 0.02 1 [J] 5.6 22 [J] 56 220 (5

90

OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

PFxx-OMJ0005CN

02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 () Rc Rc NPT 1/8 NPT 1/4 G G 6 1/4 (5/32") (5/16") 1/8 1/4 1/8 1/4 95 g 125 g 55 g 105 g 135 g 65 g 135 g 165 g 95 g 145 g 175 g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F

HRX-OM-Q026

Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)

ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-K1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking

AR20-B to AR60-B

Example) AR30K-03BE-1NR-B w e V q Body size 20 25 30 40 50 60 Symbol Description V w With backflow function Nil Without backflow function K Note 1) With backflow function + V e Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 V r Port size + a Mounting Nil Without mounting option B Note 3) With bracket H With set nut (for panel mount) + Nil Without pressure

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

VQC

Refer to e.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure