Modular Type Regulators Series AR

of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D K F J H J H J H J H J AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 12.5 11 M5 x 0.8 58 M18 x 1 13 0 26 26 25 1/16 Note

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

cable 6 to 12 D D K F G1/2 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

ITV

Input/output characteristics chart VEA Communication Specifications (CC, DE, PR, RC) VY1 ITV00-CC CC-Link Ver 1.10 ITV00-DE DeviceNet Volume1 (Edition3.8), Volume3 (Edition1.5) ITV00-PR PROFIBUS DP DP-V0 ITV00-RC RS-232C Model VBA VBAT Protocol Version Note 1) 156 k/625 k 2.5 M/5 M/10 M bps 125 k/250 k/500 k bps 9.6 k/19.2 k/45.45 k 93.75 k/187.5 k/500 k 1.5 M/3 M/6 M/12 M bps 9.6 kbps Communication

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Brown Black Red Black Orange Black Y ellow Black Vcc GND A A B B Z Z Connector B terminal no.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

Fieldbus System

, 3/5(E) port] Applicable tube O.D.: 10, 3/8" 8 DIN rail 5.5 PE B A B A B A B A B A A 4 3/5 A 4 A 4 A 4 A 4 35 (114.8) 97.5 113.4 116.7 39.5 26.5 E X 101 1 81.2 61.7 Cm: 14.5 01: 16.2 P 47.3 5.5 B 2 B 2 B 2 B 2 B 2 4 x M5 mounting hole 1.4 10.9 2.7 4.7 1/8 [4(A), 2(B) port] SI unit L2 34.2 1.5 One-touch fitting [4(A), 2(B) port] L4 (DIN rail mounting hole pitch: 12.5) 5.3 Applicable tube

NCG/CG1

D-M9 A/D-M9 AV (With indicator light) D-M9NAV V A B 9 M D A B 9 M D A N 9 M D D-M9PAV D-M9PA Auto switch part no.

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

Vacuum Pad: Ball Joint Type

Q Hexagon width across flats 13 1/8 (Rc, NPT, NPTF) Hexagon width across flats 8 M5 x 0.8 M14 x 1 Hexagon width across flats 19 M10 x 1 5 5 D C Hexagon width across flats 14 3 I I K 3 D C J J H F Hexagon width across flats 8 M5 x 0.8 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 10 H F Hexagon width across flats 2 Y 2 Y A B 2.5 A B Stroke: 10 mm Dimensions: 10 mm Stroke

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

MY1

C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3

ZP

Bellows Bellows ZX Hexagon width across flats 12 Hexagon width across flats 10 ZR (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 ZM ZH ZU ZL D G: M4 x 0.7 G: M5 x 0.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 ZY A B Y Model C D E K A B K L Y Model C L F F F D ZPY20B ZPY25B ZPY06B ZPY08B 25 28 18.9 37 14 10.5 10.5 20

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 14.4 10 3.4 01: R1/8 N01: NPT1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 833 Low Differential Pressure Sensor Series PSE550 Series Rated pressure

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8

Electric Grippers

5 6 7 9 3 4 5 6 7 9 5.7 7 9 12 14 17 5.7 7 9 12 14 17 2 2.5 4 5 6 7 2.9 3.4 4.5 5.5 6.6 9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Flat Fingers (C) F C W J K D G 4 x MM, thread length L Thread for attachment mounting A B [mm] G Weight (g) Model J K MM A B C D F When opened When closed L W LEHZ10K2-4C LEHZ10LK2-4C LEHZ16K2-6C LEHZ16LK2-6C LEHZ20K2-10C LEHZ20LK2-10C LEHZ25K2

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-