42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Fieldbus System

82.7 56.6 2 35.2 31.6 14.2 11.1 8.7 13.2 8 P 1 B 2 P 1 B 2 B 2 B 2 B 2 (56.6) 3/5 E 3/5 E 4 A 4 A 4 A 4 A 4 A (For DIN rail mounting) (21.7) (Pitch) P = 19 20.5 25 (10) (14.3) Note 1) These figures show the SS5Y7-10S6Q32-05D-C10.

SX

A: Orange B: Green (P , EA, EB port) 2-M5 x 0.8 (Pilot EXH port) Triangle mark Manual override (Press and turn for the locking type.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

MGP

24 110 110 120 120 M5 X 0.8 10 10 12 12 40 44 44 44 300 300 3 3 3 4 5 5 17 17 56 62 81 91 15 17 29 29 3.5 3.5 3.5 4.5 25 27 39 39 41 46 54 64 50 56 72 82 12 16 20 25 37 38 44 50 CY1 16 M5 X 0.8 18 167 167 M6 X 1.0 MY1 26 M6 X 1.0 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Dimensions A, DB, E A E DB A E DB Bore (mm) 100st< 50st< 100st 50st< 100st Bore (mm) 100st< 30st

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

E > Es E Es Note 3) Bore size determination Tentative determination of L type NG Determination of allowable stroke (W + WB) V 2 E = () 2 1000 E > Es Note 2) OK P > Ps Determination of pressure (P) when making intermediate stop P Ps Consider made-to-order products, depending on an operating condition.

CY1

Determination of load's kinetic energy (E) E > Es E Es Bore size determination Tentative determination of L type (W + WB) V 2 E = x () 2 1000 P Ps Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps Review of order made products based on operating conditions Tentative determination of L type (Refer to page 5 for intermediate stops.)

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D 34H9 42H9 52H9 65H9 Rc 1/8 (G 1/8, NPT 1/8) 82H9 569 Parallel Style Air Gripper

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

VDW

4 11 34 15.5 30.5 33 16.5 19.5 20 4, 6 14 17 35 Port size M5/M6 Grommet Y W 2 x 3.4 Mounting hole U X U1 X1 D Q F 300 Full wave rectifier (AC type) R E C (mm) Model Port size P B B1 E C D F 20 VDW1 VDW2 M5(M6) 20 10 46 15 9.5 11 2 x P Port size B1 M5(M6) 22 11 51 9.5 13.5 B Mounting bracket dimensions Electrical entry Model Port size P Grommet U U1 X1 Y W X Q R 39 VDW1 VDW2 28 14 17 17 M5

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

CL

MLU E D P ML1C CLJ2D16D19 16 8 Silencer -X 12 2 20Head cover port in axial direction (R) 25.5 Data M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Lock nut Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 5H9 +0.030 0 71 46 6 Clevis pin (5d9 ) 0.030 0.060 M5 x 0.8 Rod side cylinder port 31 M14 x 1.0 28 23 5 M5 x 0.8 Head side cylinder

One-touch Fittings Series KQ2

KQ2E Inch size tube/metric thread (formerly IQ) e l b a c i l p p A . D .

Electric Actuator

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] Model 30 50 100 150 200 250 300 350 400 450 500 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

Free Mount Cylinder

8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5

ZP

) (Miniature tube fitting Series M5) e Hexagon width across flats 7 Hexagon width across flats 7 (Miniature tube fitting Series M5) Flat with ribs c a Hexagon width across flats 7 d b Flat Applicable Tubing Applicable Tubing Flat/Flat with Ribs H: M6 x 1 H: M8 x 1 Y H: M5 x 0.8 H: M6 x 1 E D E ZPY02U 2 4 6 8 Applicable tube O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Shaft Shaft J K T J K T type type Q1 = M Size Size L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 L2 = Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 The long shaft can be further shortened

LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Base mounted (5 port) SYJ3 4 M 2 0 5 4 port Port size Body option Manual override : Without sub-plate : Non-locking push style 0: Individual exhaust for the pilot valve 3: Common exhaust for the pilot and main valves Manifold type 31, S31, 32, S32 (With gasket and screws) R Port P, E Port R Port P, E Port 5 port D: Push-turn-locking slotted style M5: With M5 port sub-plate For sub-plate,