CNA

CNA63 or more. 0.5 MPa Graph (4) Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-7-6 7 Model Selection Series CNA Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 CL 80 50 40 100 100 Load weight: m (kg) Load

CNA

CNA63 or more. 0.5 MPa Graph (4) Load in the direction of rod extension Load in the direction of rod retraction m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-7-6 7 Model Selection Series CNA Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 100 63 CL 80 50 40 100 100 Load weight: m (kg) Load

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

CJ5-S

t LH l m L LT (LX) LG LF 4-LD (LV) LP LE Part no.

CJ5-S

t LH l m L LT (LX) LG LF 4-LD (LV) LP LE Part no.

I

(V) 5 1.5 0.7 3 2.5 1.3 AC125 0.1 AC250 0.8 1.5 2 0.5 1 3 DC30 4 2 3 3 0.1 DC125 0.05 0.4 0.05 0.4 Insulation Resistance 100 M@ 500V (DC) *High Inrush Circuits D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 H O W T O O R D E R P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 IS3 0 C O N N E C T I O N L A M P 0 Rc(PT) 1/ 4 1 Flange No

15

Specifications Model LEYG25 M L (Top mounting) LEYG25 M LD (In-line) LEYG32 M L (Top mounting) LEYG32 M LD (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Note 2) Horizontal 18 50 50 30 60 60 30 60 60 LEF Work load [kg] Vertical 7 15 29 7 17 35 10 22 44 Force [N] Note 3) LEJ (Set value: Rated torque 30 to 90%) 65

CG5-S

t LH l m L LT (LX) LG LF 4-LD (LV) LP LE (mm) (mm) Part no.

CQS

Option No option Rubber bumper Rod end male thread C M * "C" and "M" can be combined. Cylinder stroke (mm) Standard stroke Bore (mm) Standard stroke (mm) Action 12, 16 5 , 10, 15, 20, 25, 30 D Double acting 20, 25 5 , 10, 15, 20, 25, 30, 35, 40, 45, 50 Mounting Bracket Part No. Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Series: 25A-ISE20, Rated Pressure Range: CH (-0.1 to 2 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specifications: P (Unit Selection Function, Initial value psi), Piping Specification: 02 [R1/4, (M5, Female Threaded)]

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Series: 25A-ISE20, Rated Pressure Range: A (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: B (Panel Mount Adapter)

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

O-ring C6 C6 (Mounting side should be machined to these dimensions.) 5 Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W Dimensions: 25, 32, 40 L (LL) PA 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K YW PB QW LW Q + Stroke PG P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) P (Port) W CH LH RR1 SS NE

SMC Electronic Switch Series Variations

Operating humidity range P.3.14-3 Vacuum breaking pressure Full scale Operating indicator light P.3.14-5 P.3.14-4 Voltage resistance Full span Operating pressure range Operating temperature range Operating voltage G W Orifice Gas contact part Wind comparator mode P.3.14-5 P.3.14-3 P Grommet Panel mounting H Z Peak indication part P.3.14-4 PNP output Hysteresis Zero out (Zero

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Piping Specification: NPT 1/8, Option 1: -, Option 2: -, Option 3: -

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8)