0.

(A) 2 p p p C4 C6 C8 C10 M5 02 p p p p 4 1 (P) 3 (R) Body type Note) For inch size one-touch fittings and option thread type, refer to page 15. 2 Body ported Manual override Nil: Non-locking push type (Tool required) B: Locking type (Tool required) Function Symbol Specifications DC AC (0.35 W) p Note 3) Nil Standard p ++(0.9 W) p B Note 1) High speed response type High pressure type

Free Mount Cylinder

8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5

Free Mount Cylinder Series CU

, Pressure control equipment Air preparation equipment Relief port 2-M5 x 0.8 2-P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2-P through A 4-T counter bore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 GA A Bore size B C D E P R T GB GC H J MM 10 7 13 22 3 23 3.2 7 31 16 15 13 10 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89 80 85 90

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C10 M5 02 One-touch fitting for 3.2 v v v v Configuration One-touch fitting for 4 2 position single One-touch fitting for 6 (A) 4 (B) 2 One-touch fitting for 8 1 One-touch fitting for 10 M5 thread Rc(PT)1/4 5 (R1) 1 (P) 3 (R2) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 Note 1) Refer to p.1.12-27 for inch size and One-touch fitting. 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF 74.5 VFR 39.5 VP7 VP4 Individual SUP spacer VVQZ1000-P-5-M5 VVQZ2000-P-5-01 VVQZ3000-P-5-02 M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VQ VQ4 B VQZ Used to form a separate supply port for an interior manifold station or stations.

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Table of Contents

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

Vacuum Module Series ZX

Rc 1/8 Port exhaust Silencer exhaust 11.5 27 20 PD 8 13 (33.2) Bracket B ZX1-OBB V 2 x 3.6 (Mounting hole) P (Standard accessory) Release pressure SUP port (PD) M5 (or M6) Plug Note) Air pressure SUP port (P) M5 (or M6) (55.4) 17 17.5 50 PD V P 18 8 6 10 2 x 3 (Mounting hole) Vacuum port (V) M5 (or M6) 1 3 5.4 Note 1) Remove the plug at external release.

Electric Actuator

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] Model 30 50 100 150 200 250 300 350 400 450 500 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

Air Cylinder

(For B: Basic) CM2 Bore size GA P Bore size GA P 20 14 M5 x 0.8 50 (14) (Rc 1/4) 25 13 M5 x 0.8 63 (14) (Rc 1/4) 32 (12) (Rc 1/8) 80 (20) (Rc 3/8) 40 (13) (Rc 1/8) 100 (20) (Rc 1/2) 2 x P GA CM3 CG1 CG1 * When female thread is used, use a washer, etc. to prevent the contact part at the rod end from being deformed depending on the material of the workpiece. ( ): Same as the standard model.

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

24

[mm] MGPM, MGPL Common Dimensions Bore size [mm] Standard stroke [mm] B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P Nil TN TF 16 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 7 6 30 10.5 7.5 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 20 25, 50, 75, 100, 125, 150, 175 200, 250, 300, 350, 400 78 62 10 8 8 36 11.5 9 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8

CRBU

B C D R Model CDRBU2WU10-S 22 45.5 14 M5 x 0.8 CDRBU2WU15-S 25 47 18 M5 x 0.8 CDRBU2WU20-S 34.5 51 20 M5 x 0.8 CDRBU2WU30-S 47.5 55.5 22 M5 x 0.8 CDRBU2WU10/15-D Double vane type CDRBU2WU20/30-D A port B port A port B port A port B port Free mounting rotary actuator Free mounting rotary actuator Free mounting rotary actuator Cover Angle adjuster Angle adjuster Angle adjuster Switch unit Switch

Basic type / Direct mount type Series CY3B/CY3R

LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4 x J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) A B C E ED EK F G H HA HB HG HI HL HP HS HT J JK K L Model +0.030 0 +0.030 0 CYP15 CYP32

Modular F.R.L. Unit

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B B N.C.: Gray N.O.: Black B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Port size Model B C D A Q T N P L M K K J H G F E B AC10B AC20B AC25B AC30B

VZ3000

SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79

5 Port Air Operated Valve

Bracket (for VFA1000 double) DXT144-8-1A (With 2 mounting screws) 1501 VFA1000/3000/5000 Series Dimensions: VFA1000 Series/Body Ported 2 position single VFA1120-M5(-F)(-P) 2 position double VFA1220-M5(-F)(-P) (11.7) (11.7) (Distance between ports) (Distance between ports) 38 M5 x 0.8 [4 (A), 2 (B) port] M5 x 0.8 [4 (A), 2 (B) port] 26.4 (4) 6 14.8 5 B 2 B 2 26.4 10 10 1/8 (Pilot port: Upward

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Basic Style (B) 20 P 20 25 Bore size Stroke P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 H1 Width across flats B1 32 to 40 H2 Width across flats KA P E (Head side pressure port) I G G NA D Q MM NN AL N ZZ + Stroke S + Stroke N F K H A P QY

5

141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot brackets.

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.