Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Rotary Table/

, D-A93(V), D-A96(V) Auto Switch Specifications Grommet Electrical entry: In-line D-A90, D-A90V (without indicator light) Auto switch part no.

CY1F

, D-A93(V), D-A96(V) Auto Switch Specifications Grommet Electrical entry direction: Side D-A90, D-A90V (without indicator light) D-A90, D-A90V Auto switch part no.

MXF

12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(NPN) 3-wire (PNP) A96 A96V 5 V M9N M9NV IC circuit 5 V 12 V M9P M9PV 12 V M9B M9BV 2-wire Relay PLC Yes Grommet 24 V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5 V 12 V F9PW F9PWV 2-color indication F9BW F9BWV 2-wire 12 V Lead wire length symbols 0.5 m Nil (Example) F9NW 3 m L F9NWL 5 m Z F9NWZ Solid state switches marked with a symbol are produced upon

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(NPN) 3-wire (PNP) A96 A96V 5 V M9N M9NV IC circuit 5 V 12 V M9P M9PV 12 V M9B M9BV 2-wire Relay PLC Yes Grommet 24 V 3-wire (NPN) 3-wire (PNP) F9NW F9NWV Diagnostic indication IC circuit 5 V 12 V F9PW F9PWV 2-color indication F9BW F9BWV 2-wire 12 V Lead wire length symbols 0.5 m Nil (Example) F9NW 3 m L F9NWL 5 m Z F9NWZ Solid state switches marked with a symbol are produced upon

V

M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

MXS Series Air Slide Table

L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 10 420 E= ( ) =0.09 2 9.8 1000 V=1.4 x 300=420 Calculate kinetic energy E(J) of moment. Calculate allwable kinetic energy Ea(J). Check that kinetic energy of moment does not exceed allowable kinetic energy.

KJ

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 Symbol 01 02 03 04 Symbol 50 60 65 80 85 15-2-87 16 16 Series KKH Dimensions: Socket (S) Male thread type (mm) A1 A2 When connected T Connection port size D H Width across flats L2 When connected Effective area mm2 L1 Min. bore size Body size Weight g A2 Model A1 T KKH3S-01MS R 1/8 33.5 20.4 20.4 6.0 36.0 14 40.0 37.5 D -02MS 19.6 R 1/4 1/8 31.5 19.5

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(PNP) 2wi,e 1"-" 24 V , 5 V, 12V M9NA G rommet 13-wlre (NPN) M9PA I( ( l 3-wire (PNP) . , IWaler reSlS lanl (2color 1 nc!lCaIlQ Il) 12 V M9BA I C ( . 5 V. 12 r~~~r-+~~ -~ ' IC Cii~""ili 2wire 14wIr. (NPN) 5 V , 1. 1; "'co" 1"-~"-:':""2-' Vf"'I~..,.) ~ V"c cr),: ,+;--,1~:o~-+_~ = -+~-+:=-+,1: =~__f'I C,-,;;~ = I or"'""'.j,"ili Relay.

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

PSxx-OMM0002CN

P PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PSxx-OMU0005CN

/-R () NPN 2 Max.28 V80 mA 1 V -21No.PS-OMU0005CN-C -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13 35 1 (62 ) () () (27 ) (29 ) (3 ) (25 ) 3 () 3 -23No.PS-OMU0005CN-C ON OFF ON ON OFF ISE20B [P_1] OUT1 0.500

1

How to Order CJ1 MGG M V G5BAL Stroke Mounting style Bore size XC58 CJP Slide bearing Water resistant cylinder Water resistant type/Built-in hard plastic magnet V FKM seals (Fluoro rubber) CJ2 Water resistant 2-color indication Solid state switch CM2 Specifications MGGM 32, 40, 50 CG1 Series Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Low Profile Guide Type

12 V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire A90V IC circuit No