CG5-S

t l m L (mm) Part no.

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

manifold mounting) 1/8 (A, B port) One-touch fitting (A, B port) (4.9) 2-3.2 (For mounting) (Light/surge voltage suppressor) Applicable tubing O.D.: 6, 1/4" : 8, 5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01

3 Port Air Operated Valve Series SYJA300

plug connector (L) M plug connector (M) M8 connector (WO) Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.7 [60.9] 48.9 [51.1] 57.8 50.4 43.9 Refer to page 4-4-61 for dimensions with connector cable.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

Air Fittings & Tubing

L M Nylon Urethane M5 X 0.8 Tube O.D.

Modular Design with Uniform Body Style

min (ANR) 450 L/min (ANR) 1100 L/min (ANR) [AFD] 120 L/min (ANR) 240 L/min (ANR) 600 L/min (ANR) Nominal filtration rating*2 [AFM] 0.3 m (99.9% filtered particle size) [AFD] 0.01 m (99.9% filtered particle size) Outlet side oil mist concentration*3, *4 [AFM] Max. 1.0 mg/m3 ( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Stainless Steel 316 Fittings

31.7 35 40.5 M L Q A D N M O L Q Note 1) D is maximum diameter.

SQ1000/2000

L RUN SERIAL UNIT L ERR.

KQ2

(inch) Mass (g) Applicable tubing D1 L M Model KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 5 32 1 4 5 16 3 8 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 20.5 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Mass (g) D L A Model Note) KQ2P-01 KQ2P-03 KQ2P-05 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KQP-01 KQP-03 KQP-05 KQP-07 KQP-09 KQP-11 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 1 1 1 1 2 3.5 5

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

I J K L M N O P Misc.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Base Mounted Metal Seal/Rubber Seal Series VQ

Note) 2-4-197 VQ0/1000 Kit (Terminal block) T VQ0 (Lead wire length) L4 L3 5.2 ~ =300 131 (M plug connector) <141> 108 (L plug connector) <118.5> 118 (L plug connector) <128> 121 (M plug connector) <131> 5.5 69.5 (L plug connector) <75> 76 (M plug connector) <81> 26 5.5 35 61.5 42 66 DIN rail clamp screw 23.3 P = 10.7 58 (M plug connector) L1 4.5 12 30 L2 64 (L plug connector) n 8 7 6 5 4

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type

Modular/F.R.L. Units Series AC

G46-2-02-L G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L Round type Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Standard 0.02 to 0.2 MPa setting Pressure gauge Note 1) Round type (with color zone) Square embedded type Note 2) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)]

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.