Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

to Order SS5YJ7--40-05 -01 P port Rc(PT)1/4 Stations 01 Rc(PT)1/8 A, B port side 2 stations 02 : : 20 stations 20 R port Rc(PT)1/4 A, B port Rc(PT)1/8 Note) For more than 10 stations, supply air to both sides of "P" port and exhaust air from both sides of "R" port.

0.55

Surge intrusion circuit example (NPN outlet example) (24 VDC) P Grommet or L/M-type plug connector With light/surge voltage suppressor (lZ) Output circuit Surge voltage (~) 24 V 0 V sol.1: Energized 2 V or less LED Varistor Coil R Surge voltage 0 V (~) sol.2: Deenergized 2 V or less Surge voltage R P DIN or Conduit terminal With light/surge voltage suppressor (lZ) 24 V 0 V Large capacity

SV

0 V V CANL FG BS + BS 24 V 0 V BDH BDL BS + BS 24 V 0 V BDH BDL CANH V + 24 V 0 V V CANL CANH FG V + Slave unit 75 Slave unit 03 Slave unit 01 Master unit S2 S1 S2 S1 S2 S1 S2 S1 V BDH Master Connector with terminal resistor SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Type 3 ground Type 3 ground Type 3 ground Type 3 ground CANH V + Connect the shielding wire to the SD

VS 8-2/VS 8-4

5 (R1) 3 (R2) Circuit diagram 14 Size 26 mm 112 Individual SUP spacer 49 12.5 (F) (T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

SYJ712M-l-01 SYJ722-l-01 SYJ722M-l-01 Applicable blank plate ass'y SYJ700-10-2A A Port Rc (PT)1/8 SS3YJ7-20 -05 A Port Rc (PT) 1/8 Valve model Stations 20 Type 20 2 stations 02 P Port Rc (PT)1/4 P Port Rc (PT)1/8 21 Type 21 .. .. 20 stations 20 R Port Rc (PT)1/4 Note) If there are more than 6 stations in type 20 or more than 9 stations in 21 type, supply air to both sides of "P" port and

Series SV

CANL FG BS+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

AC Servo Motor Driver (Network card type ）

For 1-phase 200 V AC to 240 V AC, connect the power supply to L1 and L3. Leave L2 open. Driver LECSN2-T5 LECSN2-T9 L1/L2/L3 Main circuit power Power supply 3-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L2/L3 1-phase 200 V AC to 240 V AC, 50 Hz/60 Hz L1/L3 P3/P4 connect P3 and P4. (factory-wired) When using a driver built-in regenerative resistor, connect P+ and D.

/

IN OUT M M 1 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port F I J K L I F J (D) DIN terminal: D Conduit terminal: T E (U) (V) E V U 32 31.5 25 (44) G1/2 T T G1/2 M M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port I F J I F J With bracket 1 f 2.6 Bracket e 2 x 8.5 b a d (mm) Electrical entry Bracket mounting dimension Grommet Model Port size P Conduit DIN terminal

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported

VEX1

DXT170-176-2-01 DXT170-176-2-02 100 V 200 V 100 VAC 200 VAC Lead wire length Symbol Lead wire length (L mm) DXT170-176-2-03 110 V 110 VAC DXT170-176-2-04 220 V 220 VAC Nil 300 240 V 6 VD 12 VD 24 VD 48 VD DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240 VAC 6 10 15 20 25 30 600 6 VDC 12 VDC 24 VDC 48 VDC 1000 1500 2000 2500 3000 Connector with light circuit

125

fluctuation 10 to +10% of rated voltage* a a 12(P1) PA 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 2(A) 3(R) 1(P) 100 V 0.78 (With indicator light: 0.81) 110 V 0.86 (With indicator light: 0.89) 200 V 1.18 (With indicator light: 1.22) 220 V 1.30 (With indicator light: 1.34) G, L, M Apparent power [VA] AC 100 V 0.78 (With indicator light: 0.87) 110 V 0.86 (With indicator light: 0.97) 200 V 1.15 (With indicator

7ND9071en

Number of switches Electrical values: According to switch type, check connection diagram from Section 12.11 2-wire, DC voltage proximity switches: I02 P+F NJ2-12GK-SN Ui: 16 V, Ii: 52 mA 2 I09 P+F NCB2-12GM35-N0 Ui: 16 V, Ii: 52 mA 2 I56 IFM IFC2002-ARKG/UP U: 10-36 V DC, Imax: 150 mA 2 I41 P+F NJ4-12GK-SN Ui: 16 V, Ii: 52 mA 4 3-wire, DC voltage proximity switches: I45 P+F NJ3-18GK-S1N Ui

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7-20 -05 -A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

PSxx-OMM0006CN

10 (p-p)10() 45 mA NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms(20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 1F.S. 2 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 3 12 V 300 24 V 600 50 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1OUT2 IP65 -550 -1060 () 3585RH() AC1000 V 1 50 M (DC500 V ) 2F.S. (25 ) 5 3.52 m 0.15