Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

0.8, R threads after installation. 15-9-55 14 Series ASD-FG Dimensions: Inch Size ASD230FG ASD330FG/430FG ASD530FG/630FG Applicable tubing O.D. d Applicable tubing O.D. d L2 L3 M1 L2 L3 M1 D2 D2 L1 L1 L4 L4 H H (Hexagon width across flats) (Hexagon width across flats) D3 D3 L5 A1 A2 A1 D1 L5 D1 A2 T T Inch Size L4 L5 A1 A2 M1 Max.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

CATALOG

2 12 x 2 16 x 2 20 x 2 25 x 2 11 or equivalent 17 or equivalent 22.6 or equivalent 28.3 or equivalent 35 or equivalent Port Size M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

Air Slide Table Series MXS

8 M3 x 10 M4 x 12 M5 x 18 M6 x 20 M8 x 25 0.5 0.9 2.1 4.4 7.0 18.0 0.5 0.9 2.1 4.4 4.4 7.0 M2.5 x 10 M3 x 12 M4 x 15 M5 x 18 M6 x 20 M8 x 25 M2.5 x 8 M3 x 10 M4 x 8 M5 x 10 M5 x 12 M6 x 16 Shock Absorber Caution 1.

e

M1 = m1 x g x X = 4 x 9.8 x 5 x 103 = 0.20 (NNm) M1 Load factor a2 = M1 / M1 max = 0.20 / 1.45 = 0.14 M2: Moment Y M2 max (from 3 of graph M2) = 1.15 (NNm) . m1 M3 = m1 x g x Y = 4 x 9.8 x 10 x 103 = 0.39 (NNm) Load factor a3 = M2 / M2 max = 0.39 / 1.15 = 0.34 M2 1095 Model Selection Calculation of Guide Load Factor 4 Calculation of Load Factor for Dynamic Moment Load FE at acceleration and

Rotary Clamp Cylinders

of the arm. 2 1 = m1 + m1 S A2 + B2 12 A 2 1.0 x 103 Find the moment of inertia of the clamp jig.

MXS Series Air Slide Table

BS* X X X BT* X X X X B* X X X X X *End lock and shock absorber options are not available for MXS6 Note 1) When buffer is used in conjunction with extension stroke adjust, stroke adjustment will limit stroke of buffer. Applicable auto switch lead wire length(m) Load voltage Auto switch part No.

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

CY1F

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y

Rotary Table/

x 0.042 = 0.380Nm Effective torque OK = 10 x 0.00109 x (2 x ( / 2) / 0.32) 10 x Ta = 10 x x Inertial load b 0.157Nm < Allowable moment OK 0.4 x 9.8 x 0.04 = 0.157Nm 0.4 x 9.8 = 3.92N < Allowable load OK 0.3s / 90 OK .

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

Compact

B 2 x 4 x Square nut M5 x 0.8 LER 8.5 5.5 (105) 105 Stroke LEH [Origin]Note 1) Origin Note 2) Origin Note 2) When LECP1, LECP6 or LECPMJ is used. 3 5.3 When LECP2 is used. When LECP2 is used.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

MXF

Find the allowable static moment Ma (Nm). 2 = 0.23/9.14 = 0.025 Find the load factor 2 of the static moment. 2 = M/Ma 3-3 Load factor of dynamic moment Pitching Examine Mep. (30 + 17) Mep = 1/3 x 8.4 x 9.8 x = 1.3 1000 We = 4/100 x 0.5 x 420 = 8.4 A2 = 17 Meap = 1 x 0.7 x 9.14 = 6.40 K = 1 = 0.7 Mpmax = 9.14 3 = 1.3/6.40 = 0.20 (Ln + An) Me = 1/3 We x 9.8 1000 Find the dynamic moment Me

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Wall x y x z x 2. Bottom 4. Vertical z y x y z Example 1. Operating conditions Model: LEKFS40 Size: 40 Mounting orientation: Horizontal Acceleration [mm/s2]: 3000 Work load [kg]: 20 Work load center position [mm]: Xc = 0, Yc = 50, Zc = 200 2. Select the graphs for horizontal of the LEKFS40 on page 7. 3. Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

PSE540/560

Y, Z directions, for 2 hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case