SYJ3000/5000/7000

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

REA/REB

4 r y !5 w !6 !3 i !0 t !8 u Parts list Description Material Description Material Note Note No. No.

Table of Contents

Function Coil voltage Light/Surge voltage suppressor AC Symbol Specifications DC (1.0 W) (1) 1 3 5 6 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 24 VDC 12 VDC Standard type Nil Yes None Nil (2) (1.5 W) (0.5 W) H High pressure type E (2) Low wattage type Y Note 1) For power consumption of AC type, refer to page 2-410.

MXW Series Long Stroke Slide Table

Table Dimensions MXW 16 Stroke: 75, 100 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 3 116 14 Scale: 30% 8 Width across flats 10 Operating port M5 x 0.8 Operation direction A 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 (Plug : M-5P) 74 36 59 32 5 8 Operating port M5 x 0.8 Y Y 33 34 33 6H9 +0.03depth 5.5 0 39 125 Operation direction B (Plug : M-5P) Operation

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM133-M5-35 (R, B, G, Y) A VM153-M5-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

I

T h e V YH y R e g R a n g e i s c o n s t r u c t e d b y u t i l i z i n g a standard control unit either alone (VY1D00-M5) or as a Pilot Valve controlling one of the Range of VEX1 Power Valves.

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

YO YZ YS YOS Function Yes Symbol Specifications DC (1.0 W) AC (3) Nil Standard type No High pressure type (Metal seal only) (1.0 W) K (1) Yes Yes (W/o indicator light) Yes (W/o indicator light) (0.5 W) Y Low wattage type External pilot type R (2) Note) Standard lead wire length: 300 mm.

CJ5-S

3 w With air cushion !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !

CJ5-S

3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Electric Actuator with Integrated Guide

w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

CY1

6 @4 @1 @8 @3 @5 @6 e y r u q o !1 #2 i @9 w $1 #1 #0 @7 CY1L10 to 40 @2 #9 @0 $0 t !4 !5 !9 #5 $2 #8 !2 !0 !6 !7 @4 @1 !8 @8 $1 #6 #7 F Enlarged view F 10,15 $1 @3 @5 @6 e y r q #2 !3 !1 o i u w #1 @7 #0 10 Parts list Parts list No. Description Slide block No.

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16