0.5

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

Electric Slide Table / High Precision Type 《 AC servo motor 》

LECSS-T,LECSN-T]Absolute 22-bit encoder (Resolution: 4194304 p/rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

LA-OMP0023

Refer to Fig. 4-1: Thrust force characteristics (P.9) and to Fig. 4-3: Allowable thrust force setting values (P.11) for details. Note 2) When mounted on a base with good heat dissipating capacity at 20oC ambient temperature. Note 3) The pushing force varies depending on the operating environment, pushing direction and table position. Refer to Fig. 4-1 Thrust force characteristics (P.9).

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

With lock/207) LEY -X5 (60) Stroke 17 37 (4) 21 Motor cable (6) 11LEFS 50.8 45 11LEJS 11LEJS 35 6.7 14.5 Vacuum port Rc1/8 Note 3) Encoder cable (7) 25ALock cable (4.5) 25.5 LEC Motor option B: With lock 6H9 ( ) depth 4 LEC S B 30 +0.030 0 LEC SS-T 6H9 ( ) depth 4 n x 5.5 11 +0.030 0 LEC Y Motorless 114 LAT 200 LZ E C x 200 (= D) 20 LC3F2 Note 1) Please consult with SMC for adjusting the

Fieldbus system EtherNet/IP compatible SI Unit

(Unit 1) Byte 3 Diagnostic data byte3 Byte 3 Output 16 to 23 Byte 4 Byte 4 Output 24 to 31 Byte 5 Byte 5 Padding data Total 4 bytes Total 6 bytes -82No.EX-OMZ0024 Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 AXA DY#B DY#B DX#B DX#D SEN7 Analogue input Digital output Digital output Digita input Digital input SI unit End plate Valve 4 byte 1 byte 2 byte Input Input Input 1 byte 1

Angular Air Gripper Series MHC2/MHCA2/MHCM2

2 t !9 !5 !4 u Parts list No. Description Parts list No.

180° Angular Style Air Gripper Series MHY2/MHW2

7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note Note No. q Description Material No. Description Material Body Bushing B !

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

1 Bumper Hexagon socket head bolt Carbon steel Urethane rubber t !2 Finger (A) Hexagon socket cap screw Carbon steel Carbon steel y !3 Finger (B) Type C snap ring Carbon steel Carbon steel u !4 Rubber magnet Type C snap ring Carbon steel Synthetic rubber i !

CEx-OMB0060

Input waveform requirements [A/B quadrature input] Two count channel input (A and B) in quadrature (90nominal phase relationship).

CP95

auto switch CP95KD B 32 100 W S Z76 With auto switch Number of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

CEx-OMI0064

0: 1: # 0 0 O W [CR] No. 0 0: 1: # 0 0 O W [CR] No. 33 - # 0 0 I R [CR] No. # 0 0 I R [CR] No. 0 0:A /B 1:UP/DOWN # 0 0 I W [CR] No. 0 0:A /B 1:UP/DOWN # 0 0 I W [CR] No. 34 - # 0 0 B R [CR] No. # 0 0 B R [CR] No. 0 0:OFF 1:ON # 0 0 B W [CR] No. 0 0:OFF 1:ON # 0 0 B W [CR] No. 35 - # 0 0 R S [CR] No. # 0 0 R S [CR] No. # 0 0 H R [CR] No. # 0 0 H R [CR] No. # 0 0 T S [CR

PSxx-OMT0001CN

0.4MPapsi 0.4MPapsi 5 10 N 1 2 3 4 5 6 1 2 NPN2 PNP2 P 6 10 3 4 0.2MPapsi 0.2MPapsi 10 7 4 5 6 M SI 5 8 10 1 7 L 7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

180

7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

ZL112A

B2 Supply valve (N.O.) Type U is 24 or 12 VDC only.