AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /m40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

Refrigerated Air Dryers

switch Ventilation air outlet Evaporation thermometer Ball valve Auto drain Terminal block F C Ventilation direction Ventilation direction J P L K Drain tube H M N (O.D. 10, length approx. 1 m) 4 x 13 Power cable holder (Electric wire diameter 9 to 11) [opposite side] [mm] Dimensions Model Port size A B C D E F G H J K L M N P Q R IDF22E R1 290 775 623 134 405 698 93 46 25 13 314 85 600 340

15

Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 LEFS25 100 W equivalent B 6 450 360 270 210 160 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340

C76

Accessory GKMDouble knuckle joint 100 165 JA-70 160 Floating joint ( ): In the case of air cushion Calculation: (Example) C76E32-50, C76F32A Basic weight 340 (32) g Additional weight 16.8/10 mm of stroke Cylinder stroke 50 mm Mounting bracket 110 g 340 + 16.8 x 50/10 = 424 g 424 + 110 = 534 g Auto Switch Mounting, Minimum Possible Cylinder Stroke Rail Mounting Type Band Mounting Type

C76

Accessory GKMDouble knuckle joint 100 165 JA-70 160 Floating joint ( ): In the case of air cushion Calculation: (Example) C76E32-50, C76F32A Basic weight 340 (32) g Additional weight 16.8/10 mm of stroke Cylinder stroke 50 mm Mounting bracket 110 g 340 + 16.8 x 50/10 = 424 g 424 + 110 = 534 g Auto Switch Mounting, Minimum Possible Cylinder Stroke Rail Mounting Type Band Mounting Type

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

h ZZ ZZ1 125 140 160 180 200 250 300 125 140 160 180 200 0.2 stroke Up to 1400 110 296 98 188 164 98 45 133 20 273 75 40 273 296 Lube Non-lube Air-hydro Lube Non-lube Air-hydro 0.2 stroke Up to 1400 110 306 98 188 184 98 45 75 40 133 30 283 283 306 0.2 stroke Up to 1400 120 322 106 206 204 106 50 40 141 25 301 75 301 322 0.2 stroke Up to 1500 135 354 115 235 228 111 60 85 45 153 30 336 340

MG

Spring washer (Nominal size 3) 491 442 393 344 295 246 196 147 98 491 OUT 25 40, 50, 63, 80, 100 12 BMG1-040 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 32 16 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 40 16 1056 950 845 739 634 528 422 317 211 1056 IN 1963 1767 1570 1374 1178 982 785 589 393 1963 OUT

Integrated Controller

Dimensions [mm] Stroke [mm] L A B n D E F G H 50 4 20 100 30 100, 150 200, 250 6 2 240 220 300, 350, 400 8 3 360 340 450, 500 10 4 480 460 550, 600, 650 12 5 600 580 700, 750 14 6 720 700 800 16 7 840 820 159.4 6 110 35 45 26 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: Right/Left Side Parallel Motor EQFS32RH Motor option: With lock (131.5) (2) (16

CS1

S X H ZZ1 h f e ZZ ZZ1 ZZ l 125 140 160 180 200 250 300 125 140 160 180 200 to 1400 110 98 164 296 188 98 45 133 75 40 20 273 296 273 0.2 Stroke Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1400 184 110 306 98 188 98 45 133 40 75 283 30 306 283 0.2 Stroke to 1400 106 106 120 204 322 206 40 141 301 75 25 50 322 301 0.2 Stroke to 1500 111 135 115 228 354 235 153 45 85 30 336 60 358 340

MGP

Spring washer (nominal size 3) 85 77 68 60 51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 40, 50, 63, 80, 100 8 16 BMG1-040 151 136 121 106 91 76 60 45 30 151 IN 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161

Profile Design ISO/VDMA Air Cylinder Series CP95

450 580 430 540 630 0.3 450 350 460 340 420 500 0.4 370 300 390 280 350 420 G (rear) 0.5 310 260 340 250 310 370 0.6 270 230 300 220 270 330 0.7 240 210 270 190 240 290 0.8 210 190 250 170 220 270 0.9 190 170 230 160 200 240 1 170 160 210 140 190 220 CD 0.2 1200 920 1150 1330 0.3 760 960 730 910 1050 C 0.4 640 820 620 770 890 0.5 570 720 540 680 780 D 0.6 630 510 650 490 610 700 0.7

4/5 Port Air Operated Valve Series SYJA3000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1-5-44 5 Port Solenoid Valve Rubber Seal Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in One-touch

MGP

Piston area (mm2) Operating direction 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGP 113 102 90 79 68 57 45 34 23 113 OUT 6 12 85 77 68 60 51 43 34 26 17 85 IN MGQ 201 181 161 141 121 101 80 60 40 201 OUT 8 16 151 136 121 106 91 76 60 45 30 151 IN MGG 314 283 251 220 188 157 126 94 63 314 OUT 10 20 MGC 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 12 25 MGF 378 340

MXS

340 400 500 340 50 30 60 20 80 90 930 690 43+0.21S 600 610 670 800 600 80 50 105 30 120 160 1800 1450 1150 55+0.21S 1020 1050 1150 1300 1000 170 100 205 71 140 310 3350 2800 2250 1700 166+0.45S 1740 1750 1900 2160 1720 215 150 300 125 240 540 4900 4300 3400 2750 240+0.45S 3.11-7 Series MXS Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by

Speed Controller: Standard Type In-line Type AS Series

1/8 90 0.7 250 0.94 340 1/4 115 2.3 810 2.3 810 1/4 130 2.3 810 2.3 810 3/8 124 0.2 4.6 1,670 4.6 1,670 1/4 221 0.35 4.6 1,670 4.6 1,670 3/8 214 4.6 1,670 4.6 1,670 1/2 205 7.9 2,840 7.9 2,840 1/4 242 11.9 4,270 11.9 4,270 3/8 233 11.9 4,270 11.9 4,270 1/2 224 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type B mounting bracket Joint 32, 40 YA-03 6 18 56 55 2050, 63 YA-05 8 22 67 100 80 YA-08 10 28 83 195 Data Allowable Eccentricity 100 YA-10 12 36 100 340 32 40 50 63 80 100 Bore size (mm) Type B Mounting Bracket 1 1.5 2 Eccentricity tolerance 0.5 Backlash Joints are not included with the A or B type mounting brackets. Order them separately. (Example) Bore size 40 Part no.

Possible to transfer a workpiece at low-speed.

Front port Side port Symbol Allowable Kinetic Energy and Rotation Time Adjustment Range Made to Order Refer to page 340 for details.

WRF100

12 70 12 Fulcrum 13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360 139 Limit switch Note 1) Rc1/ 4 Clamp side port +0.015 0 4 x 8H7( )through 820.05 143 115 50 4 x 14 through 320 (mm) 3300.05 Arm type A B C T200 T240 T270 200 340

CQ2

, 63 80, 100 BQ-2 2.3-23 Series CQ2W Unit: g Weight Unit: N Theoretical Force Cylinder stroke(mm) Bore size (mm) 5 Operating pressure(MPa) Bore size (mm) 0.3 15 20 25 30 35 40 45 50 75 100 10 0.5 0.7 12 56 63 70 77 42 49 25 42 59 12 16 77 86 95 104 59 68 45 75 106 16 20 119 134 149 164 179 194 209 224 89 104 25 153 170 187 204 221 238 255 272 119 136 71 118 165 20 32 244 268 292 316 340