Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Best Pneumatics Vol. 14

Model Description AC10B G27-10-R1 G27-10-R1 (3) AD17 Y100 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC50B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC55B G46-10-02 GC3-10AS G46-2-02 GC3-2AS

High Vacuum Angle Valve, XL Series

-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External Operating time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum

CL

10 10 10 19 20 21 23 54 62 62 67 3.5 4 4 4 5.5 9 9 11 4 7 7 8 4 7 7 8 26 31 38 47 12 14 18 8 M5 X 0.8 depth7.5 10 12 16 M5 X 0.8 depth8 25 10 14 M6 X 1 depth12 Without rod boot With rod boot Bore (mm) H1 NA P PG PH PL PW S TA TB TC H ZZ e f h l ZZ Stroke range 20 25 32 40 24 29 35.5 44 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 5 6 6 8 11 11 10 10 to 200

SYJ300/500/700

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Digital Flow Switches, Series PF2A, Series PF2W

Note 7) The display unit is comformed to CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710,510 PF2A750,550 PF2A711,511 3.0 1.0 10 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.5 0.8 8 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 Flow rate (l/min) 0 100 10 25 50 75 5 2.5 7.5 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) PF2A721,521 PF2A751,551

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

Solid State Auto Switches

Weight (g) D-Y59B D-Y69B D-Y69A D-Y59A D-Y7P(V) Auto switch model 0.5 m (Nil) 9 10 3 m (L) Lead wire length 50 53 5 m (Z) 83 87 Dimensions (mm) D-Y59A/D-Y7P/D-Y59B D-Y69A/D-Y7PV/D-Y69B M2.5 x 4 L Slotted set screw M2.5 x 4 L Slotted set screw Indicator light 2.5 Indicator light 2.5 SMC 6.2 5 SMC 6.2 5 27.3 3.4 29 3.4 8.5 12.5 Most sensitive position Most sensitive position Most sensitive

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.

o

l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.

o

l H R port lpE port M:Common exhaust for main and pilot valve M5:10-32 with Nom.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

CL

12 0.032 0.059 14 0.032 0.059 63.5 76.5 81.5 90 206 223 230 257 186 201 208 237 185 202 206 229 20 25 32 40 47.6 53 67.7 78.7 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 3.2 3.2 4.5 4.5 28 33 40 49 39 43 54.5 65.5 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 Clevis style: CLG1DN Clevis Style Bore size (mm) BZ CZ L RR TE TF TH TT TV TW TX TY TZ CDH10 8 0.058 0 10 0.058 0 12 0.070 0

CJ2

TC Bore 10 16 TH TV TW TX TY 4.5 29 40 22 32 12 5.5 35 48 28 38 16 1.3-46 Built-in Speed Controller: Double Acting Double Rod Series CJ2ZW 10, 16 How to Order CJ1 Bore size 10mm 16mm 10 16 CJP CJ2 Mounting Standard stroke (mm) CM2 Basic Axial foot Front flange B L F 10 16 15, 30, 45, 60 15, 30, 45, 60 C85 CG1 Standard CJ2ZW L 16 45 MB C95 CDJ2ZW L 16 C73 With auto switch 45 CA1 Number of

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

MB

Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.