212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

JXCx-OMT0061CN

CC-Link (P.77) D 1 () E 2 F 0 OFFON 1 17 () 8F 1:ABS 2:INC 70 L 1 1mm/s 2 F8 H (-) (+) 3 F0 L 0.01mm 11.1 (P.47) )RWw0,bit6: ON 655.37 4 F0 H 70 L 1 (*3) 2 1 mm/s 5 1% F8 H 1 (*3) 70 L 2 1 mm/s [mm](65537d=1000 1h) RWw3=0001h RWw4=0001h 6 1% F8 H 70 L *3 1mm/s 1% F8 H 7 42 - 8 70 L *3 1% F8 H 9 70 L *3 1mm/s F8 H 10 70 L *3 1% F8 H 11 F0 L (-) (+) 1 0.01mm 12 F0

Shock Absorbers and Rate Controls

/Tl9 Ffll7r-l2 2tE2140 PMl500 Seria 2.38 t.06 3.7 5 3.00 .34 2,16 .50 6 .38 N/A Vtt 12.0 or. j|tlt/'.17. .{ l 1 3 .3 r 1 .6 3 1 t.7 5 I.1 4 I l{ /r w 2.3lb. tfll%-t2 2t21293305PR0125/225 2.25 l.?5 2.1t 2.38 .23 1.tl .50 .90 .25 .88 *10 4.0 or. 1/A Al1 diriensions in it'ches. l.lotes: 1. PM21EO Z dinnsion is 2.6S in. 2, Shock ab.lorbr.must be orclered separately fom foot mount kit, 3.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Servo motor-side droop pulses (Note 1, 3, 5, 6) (10 V/100 pulses) 07 Servo motor-side droop pulses (Note 1, 3, 5, 6) (10 V/1000 pulses) CCW direction CCW direction 10 [V] 10 [V] 100 [pulse] 1000 [pulse] 0 0 100 [pulse] 1000 [pulse] -10 [V] -10 [V] CW direction CW direction 08 Servo motor-side droop pulses (Note 1, 3, 5, 6) (10 V/10 pulses) 09 Servo motor-side droop pulses (Note 1, 3, 5,

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

Mist Separator

Note 3) Port size 06 is not applicable. -9- 5. Structural Drawing, Option and Replacement Parts Structural drawing / Option / Replacement parts AFM20-D AFM30-D / AFM40-D (1) (3) (2) (4) Option Part No. No.

Micro Mist Separator

Note 3) Port size 06 is not applicable. -9- 5. Structural Drawing, Option and Replacement Parts Structural drawing / Option / Replacement parts AFD20-D AFD30-D / AFM40-D (1) (3) (2) (4) Option Part No. No.

LEC-OM07605CN

2.5 15PN () (1) (2) (3) (4) (5) (6) 2 8 2. 2.6 10 EMl(1> 10 STOON/OFF100 13(23) 12.2 (1) (40)10 (2) EM1( 1)10 OFF STO ON/OFF 100 (3) 1 3 2 3 40 2 9 3. 3 .2 3.1 .3 3.2 .6 3.2.1 .6 3.2.2 .8 3.3 .9 3.3.1 .9 3.3.2 .10 3.3.3 CNP1CNP2 CNP3 .11 3.4 .13 3.5 () .15 3.5.1 .15 3.5.2 .16 3.5.3 .17 3.5.4 .17 3.6 .18 3.6.1 (SS1) .18 3.6.2 .19 3.6.3 .20 3.6.4 EM2 .20 3.7

Modular Type Lubricator Series AL

20 30 40 50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

REC

Use NA when design pivot bracket. 10-2-99 13 Series REC Construction !7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 6 6 6 6 7 7 10 12 11 14 20 53 53 53 60 67 67 74 74 3 10 10 10 10 17.5 17.5 20 20 15 7 3 3 3 3 4.5 4.5 4.5 6 32 44 47 52 53 63.5 75.5 75.5 95 95 118 123.5 125.5 144 169.5 169.5 202.5 206 38.5 22 3.5 15 7 36 49 45 25 3.5 16 8 44 58 54.5 30 4 16.5 8.5 54 71 70.5 40 5 22 11 66 86 2-TD8 (Pin O.D.)

Soft Start-up Valve AV2000/3000/4000/5000 1

/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

Ionizer Nozzle type IZN10 Series IZS

30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3

A_HEC-OM-J017

STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) HEC 3-2 Communication Format Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) COM indicates communication command.

Fieldbus system EtherCAT compatible SI Unit

ms 3 200 ms 0 Offset binary 1 Sign magnitude 0808 2 2's complement 0 Offset binary 1 Sign magnitude 0809 2 2's complement 3 Scaled 1 Sign magnitude 080A 2 2's complement 0 None 1 2 value average 080B 2 4 value average 3 8 value average -96No.EX-OMA1023 Enumeration data definion (continued) Index Value Text 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 080D 4 05 V 5 15 V 6 020 mA 7 420 mA 3

Power Valve: Economy Valve Series VEX5

R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type