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6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 OFF ON Max. 10 Symbol 2 port 60.8 (A) 2 23 R port (3 port only) 33.5 12 10 112.8 1 (P) 3 port (A) 2 52 22 13 12 10 32 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 25 30 40 * 0.5 MPa supply F.O.F.* 12 N T.T. 60 Push button (Mushroom) VM220-02-30 (R, B, G, Y) A VM230-02-30 (R, B, G, Y) A Panel mounting hole 40 T.T. 29.5 22.1 Max. 6 3

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Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening (deg) Tightening torque (Nm) 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening (deg) Tightening torque (Nm) 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to

Table of Contents

For detailed specifications, refer to page 8-30-1.

Table of Contents

30 30 Data 20 20 20 1.

CATALOG

10 M8x1.25 6 71 M14x1.5 40 27 7/16-20 30 ~600 20~600 35 70 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 M8x1.25 7 80 M18x1.5 50 32 3/4-16 30 ~600 20~600 35 86 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 M10x1.25 7 99 M18x1.5 63 32 3/4-16 40 ~750 20~750 40 102 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 M12x1.75 11 117 M22x1.5 80 37 3/4-16 48 ~750 20~750 40 116 140 1/4 1/4 92 30 52 14 124 21 31

Table of Contents

Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

A

10 M8x1.25 6 71 M14x1.5 40 27 7/16-20 30 ~600 20~600 35 70 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 M8x1.25 7 80 M18x1.5 50 32 3/4-16 30 ~600 20~600 35 86 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 M10x1.25 7 99 M18x1.5 63 32 3/4-16 40 ~750 20~750 40 102 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 M12x1.75 11 117 M22x1.5 80 37 3/4-16 48 ~750 20~750 40 116 140 1/4 1/4 92 30 52 14 124 21 31

Table of Contents

2 2 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/MHCA2/MHCM2 Confirmation of Inertial Moment of Attachment Step 2 Confirm the inertial moment of one of the two attachments.

Electric Actuators

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Air Slide Table

14.9 16.7 M8 x 1 2.5 MXQ12B 27 13 5 20 20.2 21.9 M10 x 1 3 MXQ16B 30 16 6 27 25.5 28.1 M12 x 1 4 MXQ20B 31 17 6 27 32.3 34.8 M14 x 1.5 5 Model C F J K L1 L2 M N MXQ12 29 11 7 16.2 21.9 23.7 M8 x 1 2.5 MXQ12A, MXQ12C 18.9 20.7 MXQ16 30 11 9 20 27.2 28.9 M10 x 1 3 MXQ16A 25.2 26.9 MXQ20 26 6 9 27 34.5 37.1 M10 x 1 4 MXQ20A 31.5 34.1 MXQ25 45 25 12 27 41.3 43.8 M14 x 1.5 5 MXQ25A 38.3 40.8 MXQ8B

Table of Contents

3.5 1 2 5 34 44 52 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

Smooth Cylinder/Low Speed Cylinder

90 100 With 2 MQ 35 + 30 (n 2) (n = 2, 3, 4, ) 75 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8, ) Note 1) D-A3 D-G39 D-K39 Different surfaces RHC With n 100 + 100 (n 2) (n = 2, 3, 4, ) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) Same surface RZQ 1 Different surfaces Same surface 80 90 10 35 55 75 With 2 80 90 75 35 + 30

TABLE OF CONTENTS

E53JJ8XCCM E53KJ8XCCM E53KK8XCCM E53NJ8XCCM E53NK8XCCM 200 150 150 100 60 50 30 30 200 150 150 100 60 50 30 30 1/32 3/64 3/64 1/16 3/32 3/32 1/8 1/8 1/32 3/64 1/16 1/16 1/16 3/32 1/16 3/32 .022 .055 .055 .075 .156 .156 .230 .230 020 .048 .075 .075 .075 .156 .075 .075 MODEL E54 3 Way Normally Open E54GG8XCCM E54HH8XCCM E54JJ8XCCM E54JK8XCCM E54KK8XCCM E54JN8XCCM E54KN8XCCM 150 125 100 75

ZP

30 +1 1 +1 1 +20 +4.9 +6.4 +20 +4.9 +6.4 50 50 +25 +25 +40 +49.9 +51.4 +40 + 9.9 +51.4 13-11-110 New New Vacuum Pad More shapes and sizes of pads.

Table of Contents

1 (30) MSQ 3 MRQ D202 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

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85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70

Battery-less

*3 Horizontal 2 8 12 Vertical 1.5 3 6 6 12 10 20 Pushing force 35% to 70% [N]*2 *3 18 to 36 37 to 74 69 to 138 91 to 182 174 to 348 109 to 218 210 to 420 Max. speed [mm/s]*1 *3 400 200 100 400 200 400 200 Actuator specifications Pushing speed [mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration [mm/s2] 5000 Positioning repeatability [mm] 0.01