51

(mm) 20 25, 32 40 50, 63 80 100 Part no.

CG5-S

14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed before shipment from factory.

MLU

Size 25 32 40 50 Part no.

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Plate Cylinder with Lock Series MLU

Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

76

230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

SX

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 111 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

Vacuum Saving Valve

Recommended Pad Diameter per Product A5 B5 B6 A8 A01 B01 AG1 BG1 AN1 BN1 Connection thread symbol for the pad Thread size M5 M6 M8 R1/8 G1/8 NPT1/8 Recommended pad diameter (mm) 25 or less 32 to 50 3. Do not disassemble the product. Once the product is disassembled and reassembled, it will not be able to satisfy the original performance. 4.

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

Clean Exhaust Filter

/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

SZ3000

/location) Pilot port blocking disk: SZ3000-114-2A Supply/exhaust block assembly (8): SZ3000-50-2A-C8 Supply/exhaust block assembly (6): SZ3000-50-2A-C6 External pilot block assembly (6): SZ3000-54-2A-C6 External pilot block assembly (4): SZ3000-54-2A-C4 For SMC use only Enter the ordered part numbers. Part No. Quantity Part No. Quantity Order No. Clerk (code No.)

VCC

(C) Ambient temperature 5 to 50 Lubrication Not possible (Initial lubricant: White vaseline is used.)

Vacuum System Peripherals:

Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 ASG22F-M5 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 M5 x 0.8 6, 10, 16, 20 R1/8 20, 25, 32 R1/4 20, 25, 32, 40 R3/8 40, 50, 63 R1/2 63, 80, 100 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperature 5 to 60C (No freezing) Number of needle rotations 10 turns

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

PSxx-OMM0006CN

()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1OUT2 IP65 -550 -1060 () 3585RH() AC1000 V 1 50 M (DC500 V ) 2F.S. (25 ) 5 3.52 m 0.15 mm 2(AWG26) 0.95 mm CEUL/CSARoHS 1 2 3 -60No.PS-OMM0006CN-E 01 N01 W1 WF1 M5 C4 C6 NPT1/8 (M5 ) Rc1/8 G1/8 M50.8 4 6 R1/8 (M5 ) ZDC2POMSUS304 C304() O HNBR C3602 () O HNBR ZDC2 O HNBR 78 g 79 g 97 g 97 g 104 g 101 g

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS121F-U10/32-03T 31 5/32" 9.3 M50.8 8 9.6 4.5 0.7 27.4 4 9.3 10 0.7 27.4 10-32UNF 8 9.6 4.5 10 31 AS121F-M5-06T AS121F-U10/32-05T 11.7 16.5 3/16" 11.4 21.3 26.1 18.1 22.9 13.5 6 11.6 11.7 AS221F-01-23ST AS121F-U10/32-07T 13.5 12 18.3 23.1 1/4" 3.2 8.4 20 12.7 20 AS221F-01-04ST AS221F-N01-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1

PSxx-OMU0005CN

0.4 V 5ms -76No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 3 MPa,kPa,kgf/cm 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 2, bar,psi LCD 3 (X2) 1)/ 2) 1)4 7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP65 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE (EMC RoHS ) 2 m 1(0 ms) 2 3MPa/kPa 490 5 -77No.PS-OMU0005CN-C M5 01 N01 C4L C6L M50.8 R1/8 NPT1/