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Applicable bore size A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 8 8 8 I-G02SUS Y-G02SUS 20 20 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 10 10 10 10 I-G03SUS Y-G03SUS 25, 32 25,32 M10 x 1.25 41 10.5 20 30 M10 x 1.25 12.8

VX2 Table (1) Indication of Flow Rate Characteristics VXK Indication by international standard Corresponding equipment Other indications Conformed standard VXD ISO 6358: 1989 JIS B 8390: 2000 C, b VXZ Pneumatic equipment JIS B 8390: 2000 Equipment: JIS B 8379, 8381-1, 8381-2 VXS VXS S Cv VXB ANSI/(NFPA)T3.21.3 R1-2008 IEC60534-1: 2005 IEC60534-2-3: 1997 JIS B 2005-1: 2012 JIS B 2005-2-3

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. Bellows side Chamber Vacuum pump 476 XLAQ/XLDQ Series Specific Product Precautions 2 Be sure to read this before handling the products. Maintenance Caution 1.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JIS Symbol CNA Cushion Yes Up to 250: , 251 to 1000: , 1001 to 1500: , 1501 to 1600: +1.0 0 +1.4 0 +1.8 0 +2.2 0 Stroke length tolerance CNS Basic style, Axial foot style, Rod side flange style, Center trunnion style, Single clevis style, Double clevis

Table (1) Indication of Flow Rate Characteristics Corresponding equipment Indication by international standard Other indications Compliant standards Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C, b ISO 6358:1989 JIS B 8390:2000 Pneumatic equipment S JIS B 8390:2000 Equipment: JIS B 8379, 8381-1, 8381-2 Cv ANSI/(NFPA)T3.21.3 R1-2008 Kv IEC

(A conversion cable is not required for the JXC-W2.) 2 Step Motor Controller JXCE1/91/P1/D1/L1 Series How to Order Actuator + Controller R1 CD17T LEFS16B-100 Controller Nil Without controller Cm1mm With controller Actuator type Refer to How to Order in the actuator catalog. For compatible actuators, refer to the table below.

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 37 (mm) r2 = 2.7) A part z1 m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Calculation of weight m1 = a x b x c x Specific gravity Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} X 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10

A L1 R1 E1 U1 MM A1 NDH10 NX Bore size (mm) Applicable pin 20 25, 32 40 50, 63 80 100 Part No.

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 37 (mm) r2 = 2.7) A part z1 m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Calculation of weight m1 = a x b x c x Specific gravity Moment of inertia around Z1 axis IZ1 = {m1(a2 + b2)/12} X 10-6 Iz1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) IA = 0.8 x 10-6 + 0.006 x 372 x 10

acting Spring locking Non-lube type 125, 140, 160 Cylinder Specifications Type Non-lube type Fluid Air Proof pressure 1.46MPa {14.9kgf/cm} 0.97MPa {9.9kgf/cm} Maximum operating pressure Minimum operating pressure 0.08MPa {0.82kgf/cm} 50 to 500mm/s Piston speed Without auto switch: 0C to 70C With auto switch : 0C to 60C Ambient and fluid temperature Symbol (With no freezing) Cushion Yes to 250

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

Relationship of liquid entry and sliding distance Amount of liquid entry (g) X 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...

R11/2 R2 mm 10 1 2 kg 54 62 100 116 kW 22 37 55 75 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDF Series 6-1 6 1 IDX-OM-W026 6 6-3 IDF22E, IDF37E Guige Guige ( 10) Guige (10) (820) 17 4-13 (17) [] mm A B C D E F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 100mm, Motor: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting

Size: 32, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 100mm, Motor: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Connection thread size for pad side M5 x 0.8 Rc1/8 M6 x 1 G1/8 M8 x 1.25 NPT1/8 R1/8 No need for switching operation when changing workpieces. Multiple vacuum pads can be operated by one ejector.

Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.

/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN