Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

One-touch Fittings

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

Industrial Filters

/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133

OMR0032

Caution Prepare 2 separate 24 VDC power supplies for the CN1 controller power supply and CN5 input / output signal power supply. 35 - (3) Pulse input internal circuit B7 R1 B8 Pulse input signal switch R2 B9 Main circuit R3 B10 R1 R2 R3 Pulse input signal Power supply voltage Input signal method Current limiting resistor R for pulse input signal

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

Pallet Lock Cylinder W-R1/W-R3 Series

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Metal seal)<83> 300 (Lead wire length) VS 54<55> Indicator light 80 (Rubber seal)<81> 60<61> Indicator light VS7 54<59> 49<52.5> R1 R2 R1 R2 P P 81<82> 75<76> Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-37 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 Grommet(G): VQZ125 (R)lGl01 2 position double 0 1 23.4Mounting holes 300 95 (Lead wire length) 47.5 18 7.2 7.2 3 R3

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0.23mm2 < >: AC 61.5 54 3 4 5 36 0 1 M plug connector (M): VQZ2 2 (R)wMwC4, C6, M5 37.5 <42.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23mm2 73.5 160 135.5 <137.5> 61.5 <62.5> Indicator light < >: AC 1.12-14 VQZ1000/2000/3000 Body Ported VQZ3000 2 position single 0 1 Grommet (G): VQZ312 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 95 58 24.5Mounting holes 24.4 9 9 R3

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X5 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 50mm, Motor Option: w/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 1.5m, Controller: IO-Link, Mounting: Screw Mounting, I/O Cable: -, Communication Plug Connector: -

Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 50mm, Motor Option: w/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 1.5m, Controller: PROFINET, Mounting: Screw Mounting, I/O Cable: -, Communication Plug Connector: -

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R1 (1.5m), Controller: CL1 (IO-Link), Mounting: 7 (Screw Mounting)

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R1 (1.5m), Controller: CP1 (PROFINET), Mounting: 7 (Screw Mounting)

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 200mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 16, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 50mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)