Size: 25, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 200mm, Motor Option: w/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 5m, Controller: Ether Net/IPâ„¢, Mounting: DIN Rail, I/O Cable: -, Communication Plug Connector: -

Size: 25, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: w/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 5m, Controller: C61 [Parallel Input (PNP)], Mounting: Screw Mounting, I/O Cable: I/O Cable, 3m, Communication Plug Connector: -

Size: 25, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: Top Mounting, Lead: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 250mm, Motor Option: w/Motor Cover, Guide Option: w/o Option, Actuator Cable Type, Length: 5m, Controller: Ether Net/IPâ„¢, Mounting: DIN Rail, I/O Cable: -, Communication Plug Connector: -

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 250mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C61 [Parallel Input (PNP)], Mounting: 7 (Screw Mounting), I/O Cable: 3 (I/O Cable, 3m)

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 250mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: Top Mounting, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

The rod type electric actuator LEY series has various body sizes with thrust equivalent to 16, 25, and 32 bore size. Direct or bracket mountings are available in three directions or types. Thrust, speed and positioning * can be managed with the use of an optional controller. Possible applications include transfer, opening and shutting, pressing, pushing, and press-fitting.Three body sizes

Table of Contents

{Port 3 (R2) is individual and 5 (R1) is common.}

42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

Fluoropolymer Piping Equipment

LQ3U21-R1 LQ3U21-R2 LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 LQ1 6 x 4 3/8" x 1/4" 2 3 LQ3 LQ3 10 x 8 1/2" x 3/8" 4 3 LVN 8 x 6 3/4" x 5/8" 5 LQHB 12 x 10 4 1" x 7/8" TL TIL 6 19 x 16 5 1 1/4" x 1.1" 7 TLM TILM Note) For

SQ1000/2000

SQ1441 SQ1341 (A)(B) (A)(B) (A)(B) 2 4 (A)(B) (A)(B) 2 4 (A)(B) 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) (R1)(P)(R2) Parts list Dual 3 port valve: SQ1 41 A B C No.

VQZ1000/2000/3000

R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2 Series VQ7-6 DIN Connector Type 2 position/Single : VQ7-6-FG-S Single (reverse pressure): VQ7-6-YZ-S 50 68.5 52 120.5 68.5 120.5 2-6.5 Mounting hole 50 25 25 42.5 42.5 13 (port A) 13 (port B) 3-Rc3/8 (R1, R2) Manual override R1 R2 P B A 14 50 62 11 9 12 38 50 62 13 A B R1 R2 P 2-Rc1/8 13 34 Indicator

0.4

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1)

VQ7-6/7-8

{Port 3 (R2) is individual and 5 (R1) is common.}

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

VQ5000

Set pressure with a flat head screw driver. 42 Base Mounted Type Series VQ5000 Plug-in Unit Metal seal type Rubber seal type (A) 4 (B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4

VFS

VVFS5000-22A-1 VVFS5000-22A-2 VFS5410-D VFS5410-E Applicable valve model Check valve Cylinder side pressure VFS5400-F Solenoid one side energized A B R2 R1 R2 R1 R2 R1 320 or less 320 or less P Leakage (cm3/min) P Solenoid both sides de-energized Piston SUP side pressure (P1) 0 SUP side pressure P1 (MPa) Supply pressure: 0.5 MPa Operating range Caution Double check spacer In the case of

SYJ3000/5000/7000

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5