Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

VP300/500/700

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Table of Contents

Nil Nil Without auto switch c 20S 1 pc.

Series PF2W Digital Flow Switch For Water

Nil C Thread type Nil N F Rc NPT G The cable and connector are shipped unassembled. Lead wire (Refer to page 322.)

CE2

C J G5-S Auto Switch Mounting Bracket Part No.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

VXZ

C. Normally closed N. O.

IDG

Symbol S Standard dew point (C) 60 Thread type Port size Symbol Bore Size Rc NPT G Nil N F 60 75 100 03 3/8 04 1/2 Standard Specifications/Single Unit Type (Standard dew point: 60C) Model Standard dew point: 60C IDG60S IDG75S IDG100S Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) IDG60S 0.3 to 1.0 Inlet air temperature (C) (1) 5 to 50 5 to 50 Ambient temperature

HRX-OM-S004

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Series IDG

C 0 0 Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 P1 = 0.7MPa P1 = 0.7MPa 20 20 30 30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG30H IDG50H P1 = 0.3MPa 0 P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1= 0.5MPa P1 = 0.5MPa 10 10 P1 = 0.7MPa P1 =

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

Brake mechanism added

Applicable bore size d H B C D E1 C H NX B A L1 A1 U1 I-04A 40 69 22 24 55 M14 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-05A 50, 63 74 27 28 60 M18 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-08A 80 91 37 36 71 M22 x 1.5 22.5 26 18+0.070 0 28 0.1 0.3 I-10A 100 105 37 40 83 M26 x 1.5 24.5 28 20+0.084 0 30 0.1 0.3 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08 80 M22 x 1.5

5 Port Air Operated Valve

5 Port Air Operated Valve VFA1000/3000/5000 Series RoHS SYA SYJA VZA VFA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA3 1495 VFA1000/3000/5000 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C[dm3/(sbar)] Type of actuation Port size Pilot port direction VFA1000 2 position single VFA1000 (B)2 4(A) 1 (P) (EB)3 5(EA) M5 x 0.8 1/8 VFA3000 VFA5000

Vacuum System Peripherals:

ZP Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Port size Rc Model Orifice dia.

Tie-rod Type Hydraulic Cylinder

H B Material: Carbon steel Knuckle pin Tolerance C (f8) Order no.

CLA

-A34(C), IJ.-A44(C), IJ.-AS4, F-B54 Max. SOmA I Max, 25mA Max. 12.SmA .