IDX-OM-P026E

.2 2 2. 2. 1 Environment.2 2 2. 2. 2 Fixing of product .2 3 2. 2. 3 Pneumatic piping .2 4 2. 2. 4 Draining piping.2 4 2. 2. 5 Electric wiring.2 5 2 . 3 Reinstallation of the product .2 7 Chapter 3 Start and stop 3 . 1 Before starting .3 1 3 . 2 Start.3 1 3 . 3 Stop.3 2 3 . 4 Precautions for restarting operation .3 2 3 . 5 Check items after starting .3 2 3 . 6 Signal output .3 2 Chapter 4

Vacuum Ejector Series ZM

ZM103H-J5LZ (-Q) 3 pcs.

IDX-OM-W095

IDFC80-23 IDFC90-23 2080 0.151.0MPa (7) (1) () 2045 oC85% (2) 20 oC 4.7m 3/min 7.8m 3/min 10.9m 3/min 15.4m 3/min 10 oC 2.8m 3/min 4.7m 3/min 6.5m 3/min 9.2m 3/min 3 oC 0.9m 3/min 1.6m 3/min 2.2m 3/min 3.1m 3/min 0.7MPa 50 oC 35 oC () 230V (50Hz) 10% (3) (4) 1.0kW 1.6kW 2.4kW 2.8kW (4) 5.5A 8.0A 13.0A 14.0A 30mA (5) 10A 15A 20A 30A R410A (HFC) GWP:2088 (6) 39010g 53010g 63010g

IDX-OM-W093

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5

IDX-OM-W094

. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6

SI unit for DeviceNet TM

Class common service Service code Service name 2-3. Instance attribute ID Access rule Description Value 2-4. Instance common service Service code Service name 2-5. Specific service None 3. DeviceNetTM Object (Class ID: 03h) 3-1. Class attribute ID Access rule Description Value 1 Get revision 2 3-2. Class common service Service code Service name 0Eh Get_Attribute_Single 3-3.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZS-20-5A-50 . 1 pc.

SI unit for CC-Link

Single power supply Figure 3 Figure 4 : Communication connector FG and FG terminal are connected inside the SI unit.

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 1 (Bracket)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 10 (1000mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: K (Plug Connector, 300mm)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KZ (Plug Connector, 300mm)

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: -, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: -

Symbol: Body Ported, 3 Port, Universal, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: -