Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, M6, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Open, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Open, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type

2

6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

Table of Contents

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Note Description SY940 M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm SY5000-27-1*-Q Rc 1/4: SY7000-27-1*-Q Rc 3/8: SY7000-27-2*-Q SY3000-27-1*-Q Rc 3/8: SY9000-27-1*-Q Rc 1/2: SY9000-27-2*-Q 6 Die-cast aluminum Sub-plate *Thread Pilot valve assembly Refer to "How to Order Pilot Valve Assemblies" on page 1.2-32.

ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

5-Port Solenoid Valve

6 !7 q Series o Light/surge voltage suppressor and common specification !

CATALOG

37 42 15 21 24 7 10 17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3