42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

MGP

J K (Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27 32 39 11 11 14 14 30 30 40 50

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

CM2

Symbol Maximum ambient Rod boot material temperature One side Both sides J JJ 70C Nylon tarpaulin Symbol Specifications K KK 110C Heat resistant tarpaulin -XA Change of rod end shape Mounting Bracket Part No. Maximum ambient temperature for the rod boot itself.

5

to step q.

VCC

How to Order SUS316L Stainless Steel Fitting VCC1 00 2 q VVCC1 10A 2 1 q VCK 02F K 1075 q w q Type (Passage number) q Type (Passage number) q Type (Shape) w Piping port 2 3 2D For 2 port valve For 3 port valve 2 3 K L H 1209 1008 1075 0806 0604 40 swivel elbow 90 swivel elbow Male connector 2 port valve 3 port valve 2 port/Diaphragm type Piping port for 12 x 9 Piping port for 10 x 8 Piping

Air Cylinder

1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

MG

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Prevents Micro-Bubbles

Dimensions LLAA--C Stations 4-Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 2-R 34.5 (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n-Q 118 149 180 211 P (IN) port 2-Q 74 111 148 185 (Max.

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

B2 H + Stroke A K AL A S + Stroke H Width across flats B1 ?? ??

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D Q 2-P T B U W S E K L AA I J R A X AP Y + Stroke AB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V Z + Stroke Non-lock type Lock type 8-AF AC AD AE Rod end lock Q Y + Stroke R Head end lock Dimensions not marked with an are the same as standard.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

Air Cylinder

9 Non-locking type manual release: Suffix N Locking type manual release: Suffix L CJ1 K !7 !6!5!8 CJP K @3 @6 @2 @9 @7 u q @5 @4 y !9 r t !4!0!1iow !2 @8 @1 @0 CJ2 JCM CM2 CM3 CG1 CG1 Rod end lock CG3 e w JMB MB MB1 CA2 Long stroke CS1 Component Parts CS2 No.

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CM2

J 70C Nylon tarpaulin K 110C* Neoprene cloth * Maximum ambient temperature for the rod boot only. Mounting Bracket Part No.

Secondary Batteries

Note 2) Assembly of a bracket and set nuts (90-AR30 and 90-AR40, 90-AR25(K) to 90-AR40(K)) Including 2 mounting screws for the 90-AR50(K) and 90-AR60(K). Note 3) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. Note 4) : For thread type: NPT.