HRX-OM-W002

/Z1 Option T1 Option T Flow Sensor t t EV1 EV2 PTSensor PS1 PS2 PS3 PT FL WH WH BK BK DOUT2(temp) DOUT( flow) PM DC(+) DC(-) M M OUT OUT OUT + + + 3 3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 2 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 10 12

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

Series VQ Metal Seal/Rubber Seal Body Ported

6 Voltage 1 to 6 L M 2 3 (VQ0) (VQ1000) (VQ2000) L M 2 3 (VQ0) (VQ1000) (VQ2000) VQ110L VQ110L Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The direction of the L and M connectors of a pilot valve is opposite to that of the single and double styles.

SMC Pneumatic Clean Series

Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

C95

From 0.4 MPa Graph (6) m From 0.5MPa Graph (7) F 6-12-27 28 Series C95N Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 80 200 200 63 100 80 100 100 50 40 100 100 Load weight: m (kg) Load weight: m (kg) 63 50 40 30 50 40 30 32 50 40 20 20 32 10 10 5 4 3 5 4 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Compact Type Dual-Rod Cylinder Series CXSJ

Axial piping available (6, 10) Compact Type Dual-Rod Cylinder Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Port thread type Nil Port position M thread Rc1/8 NPT1/8 G1/8 6 to 25 P Port position 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 1 n M L Bearing type Slide

15

Mounting orientation and static moment Mounting orientation Static load Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 10 15 20 25 32 40 m m x g x x m x g x y 19 21 25 27 33 40 49 m x g x x m x g x y m x g x (z + A) m x g x x m x g x (z + A) m x g x y M1 M2 M3 Static moment A: Distance between the center of the guide shaft and the upper surface

CY1

SCY1L, #6 (#6 + #7) 41 Series CY1L Shock Absorber Specifications/Series RB 6 CY1L10 15 CY1L20 CY1L25 CY1L 32 40 Applicable rodless cylinder RB0805 RB1006 RB1411 RB2015 Shock absorber model 0.98 {0.1} 3.92 {0.4} 14.7 {1.5} 58.8 {6} Maximum energy absorption: J {kgfm} 5 6 11 15 Stroke absorption: mm 0.05 to 5 Impact speed: m/s 80 70 45 25 Max. operating frequency: cycle/min Note) 10 to 80C

MGP

6 !7* !8* !

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

OMU0023

2 Load mass [10g] 5 to 100 Yes Note 6) D0419 2 Movement mode(0: ABS, 1: REL) 1 0 , 1 No D041A 2 Threshold force value [0.1] 1 1 to 50 Yes D041B 2 Positioning width [m] 1 More than 0 Note 1) Yes D041C 4 AREA A position 1 [m] Note1) 1 More than 0 Note 1) Yes D041E 4 AREA A position 2 [m] Note1) 1 More than 0 Note 1) Yes D0420 4 AREA B position 1 [m] Note1) 1 More than 0 Note 1) Yes D0422 4

MXS Series Air Slide Table

30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106 MXS6-10 MXS6-20 MXS6-30 MXS6-40 MXS6-50 54 Air Slide Table MXS Series Dimensions MXS 6 With buffer (6) MXS6F 24 10 28 2-M3 x 0.5 thread 5 deep 22 0.5 19 Dimensions not indicated are the same as basic type

KP/KPQ/KPG

Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing TPH TPS KPH04-00 37.4 18 4 4 4 10.4 4 L L2 L1 D D KPH06-00 39.6 19.5 10 10 6 12.8 6 M M L KPH08-00 44.4 21.5 26 18 10 15.2 8 KPH10-00 48.6 24 41 29 15 18.5 10 KPH12-00 50.6 25 58 46 18 20.9 12 Note 1) D indicates the maximum diameter.

Compact Manifold Regulator

Metric size Inch size Stations Symbol Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

Mechanical Valves Series NVM, NVFM, NVZNI

E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54

IIIIIII

E F G H J K M N 6 8 0 (172 9l 5 6 l (142 4l 1 5 7 (40) 1.20 (30 5) 0 0 6 (1 5) 1 0 9 27 7l 0 8 9 2251 1 5 7 r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54

Plug-in Unit

B 20P AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 26P AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 (+) () () (+) 6 6 SOL. A SOL. A 1.5 m 3 m 5 m (+) () () (+) 7 7 Station 4 Station 4 SOL. B SOL. B (+) () () (+) 8 8 SOL. A SOL. A (+) () () (+) 9 9 Station 5 Station 5 SOL. B SOL.

Stopper Cylinder

6 7 RS2H D-A9/A9V D-A7/A80 D-A7H/A80H D-A73C/A80C 6 9.5 9 9.5 9.5 9.5 RSH 12 12 12 11 10 MIW MIS D-A79W 13 13 13 14 14 D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BA/F7BAV D-F79F/F7NT 6 5.5 6 6 6 5.5 5 D-P3DWA 6 Since this is a guideline including hysteresis, not meant to be guaranteed.