Precision Cylinder Series MTS

MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20

Single Axis Electric Actuator Series LJ1H

Model Regenerative Absorption Unit Selection Guide Allowable Moment (Nm) LJ1H2021PF-K (Power supply voltage 100VAC) LJ1H2022PF-K (Power supply voltage 200VAC) Allowable static moment Pitching Yawing m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Allowable dynamic moment 71 75 25 50 75 100 125 150 175 200 225 250

Electric Actuator Triple Axis P&P Unit

) Stroke+159 (For 200 to 1000 strokes) Stroke+15 200 (25) 176 110 (3) 170 110 (T-slot pitch) Stroke+15 175 1 3 Select the unit specifications after confirming the X, Y and Z axes specifications. 1 ) For detailed dimensions and specifications, please refer to the body dimensions.

Guide Cylinder Series MGG

M L K J I B AP AO AN AM AH AG AB AA AL AK AJ AI A 20 25 32 40 50 75, 100, 125, 150, 200 M6 x 1 depth 9 45 25 80 60 55 30 108 25 M6 115 65 125 112 11 12 9 6.6 95 82 99 M6 x 1 depth 13 54 35 100 70 65 35 130 30 M8 135 75 150 134 13 16 9 9 108 92 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 13 60 35 106 80 73 40 135 35 M8 140 85 150 134 16 16 9 9 118 102 129 75 50 134 95 93 50 170 45 M8 175

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 31 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD B1 2 2n1-M5 x 0.8 [4(A), 2(B) port] [With external pilot] 13.3 (Pitch) P

Table of Contents

Series VXZ Pilot Operated 2 Port Solenoid Valve Zero Pressure Differential Operation For Air, Gas, Vacuum, Water and Oil. 134 134 134 135 135 136 135 137 138 138 138 139 139 140 139 141 142 142 142 143 143 144 145 145 146 147 148 151 151 152 153 154 155 156 159 160 161 161 161 162 163 163 163 164 164 165 166 166 167 168 169 173 173 173 174 174 175 176 176 177 178 180 181 Courtesy of Steven

Table of Contents

Dimensions . 144 150 153 153 154 155 156 157 158 158 159 160 163 164 167 167 168 168 169 169 172 175 176 176 177 178 178 178 178 178 180 180 181 183 183 184 186 187 189 189 189 190 191 192 193 195 195 198 201 204 212 212 212 213 213 214 215 215 215 216 216 217 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Battery-less

Refer to the dimension drawings on pages 175 and 176 for the mounting dimensions.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x 1.75 depth 14 98 117 142 172 17 19.5 22.5 28 13 14 18 18 13.5 14.5 15.5 16 12 12 12 12 1 8 5 0 0.030 156 (189) 175

Rotary Actuator

[mm] Note 1) Port size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA BB BC CA CB Note 2) Key dimensions S SB SC SD SE S b L1 Size D50 Rc1/8 62 48 46 15 25 2.5 36 M8 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 8.5 6 9.5 7.5 5 0 0.030 25 63 Rc1/8 76 60 57 17 30 2.5 41 M10 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 10 7 11 8

Rotary Actuator/Vane Type

CRA1 Flat surface Piping port CRQ2 Shaft-end shape With angle adjuster unit MSQ + With auto switch unit With angle adjuster unit With auto switch unit MSZ Possible to adjust the angle as desired CRQ2X MSQX Rotating angle Rotating angle adjustment range 270 0 to 240 (Size 30) MRQ 180 0 to 175 90 0 to 85 Auto switch unit Angle adjuster unit Free mount type/CRBU2 Series 12% weight reduction

Stability of suction position,

60.2 55.2 95.3 ZP3E-80BMl-P 91.3 86.3 126 406 Pad Unit ZP3E Series Pad diameter 100, 125 Pad form Bellows type with groove Dimensions: Pad Unit ZP3E-100BMlZP3E-125BMl71 80 88 58 65 73 (Plate) 16.3 (Plate) 16.3 25 8 3 22 3 8 60 50.5 106 100 71.5 24 133 125 90.3 24 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-100BMl 125 114 197 ZP3E-100BMl-P 186 175

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x 1.75 depth 14 98 117 142 172 17 19.5 22.5 28 13 14 18 18 13.5 14.5 15.5 16 12 12 12 12 1 8 5 0 0.030 156 (189) 175

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CM2

46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 21.5 6 8.5 8 13 17.5 20 25 25 158 171 183 196 221 246 271 24.5 6 10.5 8 13 17.5 25 32 32 162 175

30

size (mm) Maximum operating tensile and compressive force (N) Allowable eccentricity (Umm) Rotating angle Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175

Integrated Controller

270 3 to 135 24 to 1100 16 to 750 8 to 400 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 601 to 700 20 to 630 12 to 420 6 to 230 3 to 115 24 to 930 16 to 620 8 to 310 4 to 125 30 to 1200 20 to 900 10 to 440 5 to 220 Speed [mm/s] Stroke range Actuator specifications 701 to 800 20 to 550 12 to 330 6 to 180 3 to 90 24 to 750 16 to 500 8 to 250 4 to 125 30 to 1140 20 to 760 10 to 350 5 to 175

D. P. Lube ALD600/900 Series

Lube/ALD600-06 to 10, ALD900-12 to 20 Float switch mounting position (Connection port center) AL800 AL900 ALF ALT ALD ALD ALB (Connection port center) LMU F (Bracket mounting dimensions) ALIP AEP HEP Bracket (Option) Bracket dimensions A B C D E Model Port size F 344 416.5 G 32.5 0 H 95 120 J 14 14 K 55.5 48 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 175 250 87.5 125 487 639 135 210

Electric Slide Table / High Precision Type 《 AC servo motor 》

type) Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Regeneration option May be required depending on speed and work load Motor output/Size 100W/40 200W/60 Electric specifications Motor type AC servo motor (100/200 VAC) Encoder Incremental 17-bit encoder (Resolution: 131072 p/rev) Horizontal 45 65 Power consumption [W] *5 Vertical 145 175