Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

excluding gas permeation) Leakage Maximum baking temperature 150C Ambient and fluid temperature 10 to 60C Piston speed 50 to 300 mm/s Stroke adjustment 2 to 0 mm on each side (4 to 0 mm total) Cushion Sine cushion (Air cushion) Port size 5/16-24 UNF 7/16-20 UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weight (kg) Standard stroke (mm) Model 700 600 500 450

Centering Unit

When air is supplied from the unlocking port, y the piston for locking ascends and releases the lock. 3 Centering Unit MACM Series How to Order X114 4 P 20 MACM Centering unit Made to order (Table material) X114 Stainless steel Ultra high molecular weight polyethylene Cast nylon X115 X116 Allowable load weight Symbol Allowable load weight 2 450 lbf [2 KN] 4 900 lbf [4 KN] 6 1350 lbf [6 KN

Ionizer Nozzle type IZN10 Series IZS

With L-bracket B1 With pivoting bracket B2 With DIN rail mounting bracket B3 Output specification Refer to page 450.

Series 12-REA Sine rodless cylinder

, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

AR Series Modular Type Regulator

E P.450 to 457 AV AF Made to Order 0.4 MPa Setting (-X406) The maximum set pressure is 0.4 MPa. When a pressure gauge is included, the display will show a range from 0 to 0.7 MPa. q P.456, 457 0.85 MPa Setting (-X2068) The maximum set pressure is 0.85 MPa.

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 2.6 LPM , 2.6 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 13.3 in HgV / -450 mbar , 13.3 in HgV / -450 mbar, Voltage (DC): 6, DC Motor Type: Standard, Item Dimensions: Length: 2.83 in / 72 mm Width: 1.02 in / 26 mm Height: 1.14 in / 29 mm , Length: 2.83

CM2

1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 450 2000 CS1 Order Made 40 500 2000 Made to Order Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

25 25, 50, 75, 100, 125, 150 200, 250, 300 450 32 500 40 Note 1) Any intermediate stroke that is not indicated above will be produced on order.

CYV

excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450

Table of Contents

Auto switch mounting groove (4 locations) (Finger closing port) (Finger closing port) Rc 1/8 Rc 1/8 D(Rack screw) 2-M10 x 1.5 20Width across flats 17 (2 locations) Width across flats 19 (2 locations) (Piston rod and rack screw) 2-M12 x 1.75 Closed E Open F 4-M12 x 1.75 through (Thread for mounting attachment) (mm) J 252 336 450 Note 1) J dimension is at fully closed.

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

CYP

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

CYPSeries

Standard stroke Bore size (mm) Standard stroke (mm) Piping port position 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h Nil Note 1) Consult SMC if the

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 22 36 110 180 544 612 873

Modular F.R.L. Unit

AF30 AF20 AF30 Mist separator AFM40 AFM40-06 AFM30 AFM20 AFM30 Component Regulator AR40 1/4 3/8 1/2 1/4 AR40-06 AR25 AR20 AR30 1/4 1/8 1/4 3/4 Port sizes 3/8 1/4 3/8 Note 1) 1/4 1/8 1/8 1/8 Air Pressure gauge port size Fluid Proof pressure Maximum operating pressure 1.5MPa 1.0MPa 0.05MPa Minimum operating pressure Set pressure range 0.05 to 0.85MPa Note 2) 1100 Rated flow L/min (ANR) 1100 450

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Rodless Cylinder for Vacuum Series CYV ø15, ø32

excluding gas permeation) Leakage Maximum baking temperature 150C -10 to 60C Ambient and fluid temperature Piston speed 50 to 300mm/s -2 to 0mm on each side (-4 to 0mm total) Stroke adjustment Cushion Sine cushion (Air cushion) Port size 5/16-24UNF 7/16-20UNF Vacuum grease for linear guide unit and inside the cylinder tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Regulator for 2 MPa ARX 20

500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics Conditions: Upstream pressure 2.0MPa Downstream pressure 0.8MPa Flow rate 60l/min (ANR) Conditions: Upstream pressure 2.0MPa Downstream pressure 0.3MPa Flow rate 60l/min (ANR) ARX20 ARX21 0.89 0.88 0.37 0.36 Downstream pressure MPa Downstream pressure MPa 0.87 0.35 0.86 0.34