MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS

Compact

400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]

LEF-OM006xx

16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0

Vacuum System Peripherals:

AC ZX1 With surge voltage suppressor DC: 0.45 W (With indicator light: 0.5 W) S Y Slotted locking type Non-locking push type Manual override Available only 12, 24 VDC Nil 110 VAC, 50/60Hz 100 VAC, 50/60Hz Solenoid valve rated voltage B Number of stations w-2 Individual specifications (Symbol , , , ) Indicate X for required station. 1 Vacuum switch wiring specifications 3 Nil Lead wire

LEC-OM02904

) (100) L .

MY1

5 4 MY1CW25 MY1CW25 MY1CW20 MY1CW20 1 1 MY1C MY1CW25 MY1CW25 3 MY1CW20 MY1CW20 MY1H MY1CW16 MY1CW16 MY1CW20 MY1CW20 2 0.5 0.5 MY1CW16 MY1CW16 MY1 HT MY1CW16 MY1CW16 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 MY1 W MY1 W Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) MY2C Maximum Load Mass: MY1CW MY2 H/HT MY1CW/m3 MY1CW/m2 MY1CW

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

type W, only DC voltage is available.

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

MHZ

100 150 Misc.

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

CG5-S

(G) T0403 Color symbol -20 T1075 Color symbol -100 Black (B) Black (B) Clear (C) Clear (C) 10 7.5 3 White (W) White (W) Orange (YR) Orange (YR) T1209 Color symbol -100 Black (B) Black (B) Black (B) Black (B) 12 9 White (W) White (W) White (W) White (W) T1613 Color symbol -100 Red (R) T0604 Black (B) Red (R) Red (R) 16 13 4 TU0604 TU0604 Blue (BU) Color symbol -20 White (W) Blue (BU) Blue

LEF-OM002xx

V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0

MXQ

6 r u y w !

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

65 30 106 234 80 127 11 16 13 90 229 80 32 116 255 100 137 12 20 16 100 253 100 35 123 276 1/5 stroke 125 137 12 20 16 100 255 100 35 123 278 160 155 12 24 20 108 283 120 38 131 306 95 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Single clevis type: CHAC V T 2-Rc P Cushion adjustment screw GA GB 4-J Air release CDH9 Width across flats G MM R (max.) d W

SYJ3000/5000/7000

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

VQZ1000/2000/3000

1 W DC (42 mA), 0.5 W DC (21 mA) 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Power consumption (Current) VQD 100 VAC Inrush 0.5 VA (5 mA), Holding 0.5 VA (5 mA) 110 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 200 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 220 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) Model Response time (ms) (1) Weight (g) Flow characteristics 1 4/2 (P A/B

42

Figure shows VV5Q41-08C12SQ-W.

33

capacity 1900/2200 W (50/60 Hz) Symbol Option Nil None T High pressure pump mounted Note) HRS 090 HRS 100/150 Note) The cooling capacity will decrease by about 100 W from the value in the catalog.

4-channel Flow Monitor ( compatible)

0.1 1: 1 2: 10 3: 100 UAC (Accumulated minimum unit for connection product [USEr]) Y U8 0x01 12 R/W (1) Set the accumulated volume per pulse when the user's additional range is selected. 0: 0.1 1: 1 2: 10 3: 100 UPLS (Accumulated volume per pulse for connection product [USEr]) Y U8 0x02 13 R/W (2) 0: L 1: oC 2: Ft 3: GAL 4: F 5: oFF 14 R/W Unit setting (USEr is selected) Y U8 0x00 (0) -80No.PF-OMA1011