SMC Corporation of America
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supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc. 3.3 Installation HRS Series 3-12 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.3.3 Preparation and wiring of power supply cable The electrical facilities should be installed and wired in accordance with local laws and regulations of each country and by a person who has knowledge and

When using a power supply in the overvoltage category 3, take measures such as mounting an isolation transformer between the product and the power supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc.

Installation/operation in accordance with the UL standard For the product operation in the UL compliant conditions, the conditions shown below must be satisfied: Use power supply of overvoltage category 2 (transient overvoltage 2500 V or less) 1 Bending radius of the power supply cable must be 38.1 mm or more. 1 When using a power supply in the overvoltage category 3, take measures such

V or less) 1 1 When using a power supply in the overvoltage category 3, take measures such as mounting an isolation transformer between the product and the power supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc.

V or less) 1 1 When using a power supply in the overvoltage category 3, take measures such as mounting an isolation transformer between the product and the power supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc.

Cooling capacity W 2000 Fluid: Water 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-5 Cooling capacity of HEC012 2) Heating capacity Radiating Water Temp.20 oC Radiating Water flowrate10L/min 3000 2500 Heating capacity W Fluid: Water 2000 1500 1000 Fluid: Fluorinert FC-77 500 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-

size Bore size 63 H H type L L type When mounting a floating bracket to a Series CY1B body, refer to P.67 for details, as this will be an order made product. 70 800 p32 32 700 60 600 50 500 p25 25 40 400 p20 20 30 p6 6 300 20 15 200 10 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Supply pressure (MPa) Supply pressure (MPa) 50, 63 3000 H H type 2500

1500 2000 2500 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Supply pressure (MPa) Series ITV305m Hysteresis Repeatability Linearity 1.0 1.0 0.9 1.0 0.8 Output deviation factor (%F.S.)

discharge Industrial environment Semiconductor dry cleaner Industrial environment Electric dust collector A few ppm Reference: Shigeyuki Ota and Hironori Shimizu (Eds) Ozone Riyo no Riron to Jissai ("Theory and Practice of Ozone Use") Riaraizu Co., Inc., (1989) 8 List of Ozone Resistant Products 1: Standard (HNBR) Description Series Description Series ARM Pressure control valves 1000 2000 2500

442 491 491 OUT 25 10 82.4 124 165 206 247 288 330 371 412 412 IN 161 241 322 402 482 563 643 724 804 804 OUT 32 12 138 207 276 346 415 484 553 622 691 691 IN 252 378 504 630 756 882 1010 1130 1260 1260 OUT 40 16 212 318 424 530 636 742 848 954 1060 1060 IN 392 588 784 980 1180 1370 1570 1760 1960 1960 OUT 50 20 330 495 660 825 990 1160 1320 1490 1650 1650 IN 624 936 1250 1560 1870 2180 2500

Without lead wire Nil 6 10 15 20 25 30 300 600 1000 1500 2000 2500 3000 Nil Blue (2) Red (2) Gray (2) Red: +, Black: For 100 VAC For 200 VAC Another VAC For DC 1 2 3 4 Connector Lead wire How to Order Include the connector assembly part number together with the part number for the plug connectors solenoid valve without connector. (Example) 2000 mm lead wire length.

How to Order 123 A DXT170 Lead wire length Symbol Lead wire length L (mm) Nil 6 10 15 20 25 30 300 600 1000 1500 2000 2500 3000 Connector Lead wire Hook Socket Dimensions: Connector Assembly with Cover How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. Red Black Black Polarity indication 20 Series VZ200/400 Precaution 3 Be sure to read before handling.

Ambient temperature Applicable cylinder thread nominal size Allowable eccentricity U (mm) Applicable cylinder bore size (mm) Note 1) Maximum tension and compression N Air cylinder Hydraulic cylinder JS10-4-070 JS16-5-080 JS20-8-125 JS32-10-125 JS40-14-150 JS63-18-150 M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 0.5 0.5 0.5 0.5 0.75 1 10 10, 16 20 25, 32 40 50, 63 80 210 1100 2500

Specifications Body Size (in.) 1/4 3/8 1/2 3/4 1 1-1/4 1-1/2 2 Maximum Rated Pressure (PSI) 5000 5000 5000 5000 4000 4000 4000 3000 Except the following port options in the noted size 03 (Male JIC 37) 3000 2000 05 (Male SAE O-Ring Boss) 2500 06 (Female JIC 37) 90 Housing Port 4000 3000 3000 2500 2000 06 (Female JIC 37) In-Line Housing Port 3000 2000 07 (Female NPSM) 4600 3000 2600 2100 1650

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

1000 2000 2500 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) 14-8-21 22 Series ITV1000/2000/3000 Series ITV305 Linearity Hysteresis Repeatability 1.0 1.0 1.0 0.9 0.8 Output deviation factor (%F.S.)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bourdon tube Brass Weight (kg) 0.04 0.05 AC2000/2500/3000 AR2000/2500/3000 AW2000/3000 Applicable model Note 1) When installing a pressure gauge, be careful not to fasten too tight. Excessive tightening will result in damage.

1 Fitting assemblies> (For cylinder port) VVQ1000 51A C8 (For C kit) Bore size AXT661 1 AL 3 6 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting C4 C6 C8 N3 N7 N9 Wiring Lead wire length 3 4 For double (3 wires) For single (2 wires) Dimension L (mm) 300 600 1000 1500 2000 2500 3000 5000 Symbol Nil 6 10 15 20

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

When equipped with a light, be careful not to damage the light with the cords lead wires. 10 15 20 25 30 50 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC SY3120-5LO-M5 SY100-30-4A-20 For AC SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.