KK/KK13

57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

Digital Gap Checker

Lead wire color Description 1 Brown DC (+) 30.8 2 White N.C. 3 Blue DC () 4 Black OUT1 15 ISA-19-m (Centralized lead wire) 19 6 5 4 30.8 MADE IN JAPAN 3 2 1 15 23.5 33 70 108 43.5 146 5000 55 184 10 222 Unit: mm 260 10 Stations Part no. L L 2 ISA-19-2 139 3 ISA-19-3 177 4 ISA-19-4 215 5 ISA-19-5 253 6 ISA-19-6 291 M12 connector no. Pin no.

Cylinder with Lock Series MNB

9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PPS PTFE PFA N Pilot port thread type Symbol Nil 2 Body class 6 one-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Tubing O.D. Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 1.5 55.8 R1/2 24.5 62.9

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

HRX-OM-X084

17 Brown Blue 18 (CN1) 1/2 CB Red Brown 19 1A Circuit breaker PT1 White Blue 20 2A Circulating fluid outlet White Blue 21 3A 22 Blue (CN6) 1/3 Blue Brown 23 21 Blue 24 Brown 35 Black Black Black Black 25 Blue Blue 36 FL Flow rate sensor 26 Blue Blue Black 34 27 (CN5) 1/3 Brown Blue 28 White 1 1 1 2 1 3 3 1 2 4 6 7 5 Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2) (CN6) 1/2 Brown

HRX-OM-X037

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

C95

2 !3 !4 !5 !6 !7 !8 !

CHKD/CHKG

19 21.5 24.5 34.5 A 12 13 A 13.5 19 19 21.5 24.5 34.5 20 25 32 40 50 63 80 100 Note 1) D-A9/A9V models cannot be mounted on 32 to 100.

S Couplers Series KK/KK13

57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52 22 13 106.2 -06MS R 3/4 94.4 45.5 55 27 Reference dimension for R threads after installation.

42

26) 2 Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

0.4

3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

CXS

0.2 0.2 102 96 44 76 75 5 6.3 2-6.9 through 2-11 counterbore with depth 6.3 M8 x 1.25 x 16 (Hexagon socket head cap screw) 18 M8 x 1.25 x 23 (Hexagon head bolt) M8 x 1.25 (Hexagon nut) 2-M5 x 0.8 with depth 8 2-M6 x 1.0 (Through) 4-M5 x 0.8 with depth 7.5 30 (Z) 19 11.5 T 20 9 (30) (Z) 8 2-M5 x 0.8 with depth 8 2-M8 x 1.25 with depth 12 0.2 75 16 S SS ZZ Z Part no.

Profile Design ISO/VDMA Air Cylinder Series CP95

19 23 27 Piston rod thread M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 Ports G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 Cushioning stroke [mm] 19 19 24 24 30 30 Mounting position Any Standard strokes [mm] 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 (DIN ISO 4393) [mm] Other stroke lengths in accordance with ISO 497 R 10 Stroke tolerance [mm] <250mm: +1.0/-0mm,

Thermo-chiller/Rack Mount Type

2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

ARM10/11

IN side Straight, Elbow OUT side Straight, Elbow Also available in inch sizes. 14-4-19 2 Compact Manifold Regulator Common Supply Type Series ARM11A How to Order ARM11A 1 A 1 A Z 1 07 1 2 3 4 5 6 7 1. Handle position 2.