SZ3000

L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 12 273 262.5 239.5 17 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 27

Electric Actuator/Slider Type

[mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0

Environment

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

185.5 175 150 17.5 185.5 175 198 210.5 200 223 L1 L2 L3 L4 137.5 162.5 187.5 171 13.5 212.5 192 15.5 118.5 14.5 139.5 16.5 160.5 12.5 181.5 14.5 Stations 11 13 14 15 16 12 235.5 225 248 260.5 250 234 285.5 275 255 248 273 L1 L2 L3 L4 237.5 213 17.5 237.5 262.5 223.5 244.5 202.5 16.5 13 15 12 14 37 5 Port Solenoid Valve Series SX3000/5000 Stations SS5X3-45GDC4 C6 Note) L1 to L4 dimensions

Battery-less

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15

CRB2/CRBU2/CRB1

L4 max.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] L4 [mm] L4 [mm] L4 [mm] m Me L4 600 600 1000 1000 X Motorless 400 400 500 500 200 200 LAT 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 LC3F2 800 800 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5

Compact

L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load

15

1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800

Title not found

P1, L4 T2 S/S . P1, L4 T3 S/S . P1, L4 T4 S/S . P1, L4 T6 S/S . P1, L4 RT3-1-1 S/S . P2, L5 RT3-3-1 S/S . P2, L5 RT3-1-3 S/S . P2, L5 RT1-3-1 S/S . P2, L5 X1 S/S . P3, L10 1 2 1 2 1/2 B Thd D A Thd C Hole Dia. Stainless Steel Threaded Parts Page & Part No. Line No. Page & Part No. Line No. D Line No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

With auto switch Bore size (mm) 50 st or less 55 to 75 A1 50 st or less 55 to 75 80 to 100 80 to 100 97.5 + Stroke 107 + Stroke 117.5 + Stroke 107.5 + Stroke 117 + Stroke 127.5 + Stroke 32 40 50 38.5 38.5 43.5 28.5 28.5 33.5 182.5 207.5 182.5 207.5 202.5 217 192 217 204 227.5 202.5 227.5 A1 + Stroke L4 + Stroke L3 Flange Style 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

With auto switch Bore size (mm) 50 st or less 55 to 75 A1 50 st or less 55 to 75 80 to 100 80 to 100 97.5 + Stroke 107 + Stroke 117.5 + Stroke 107.5 + Stroke 117 + Stroke 127.5 + Stroke 32 40 50 38.5 38.5 43.5 28.5 28.5 33.5 182.5 207.5 182.5 207.5 202.5 217 192 217 204 227.5 202.5 227.5 A1 + Stroke L4 + Stroke L3 Flange Style 50 st or less 55 to 75 80 to 100 50 st or less 55 to 75 80 to

Slider Type Ball Screw Drive/11-LEFS Series

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.

Vacuum Saving Valve

No.0.8 L1 L3 L2 L3 (L4) No.0.8 H 2 H 2 H 2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-AG1ZP2V-A5ZP2V-A8Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H 1 Vacuum generator side L2 L3 3 H 1 M2 H 1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H 2 H 2 L1 L1 L1 H 2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator

Rotary Actuator/Vane Type

CRB2 CRB2 W1 = L3 = L1 = CRB1 L4 = Y = L2 = MSU X = Applicable shaft types: J, K, T Applicable shaft type: K W2 = CRJ [mm] CRA1 CRB2, CRBU2 X W1 L1 max L3 max J K T J K T J K T J K T 10 6.5 to 14 0.5 to 2 X-3 L1-1 15 8 to 18 0.5 to 2.5 X-4 L1-1 20 9 to 20 0.5 to 3 X-4.5 L1-1 30 11.5 to 22 0.5 to 4 X-5 L1-2 40 15.5 to 30 0.5 to 5 X-5.5 L1-2 [mm] Size CRB2, CRBU2 Y W2 L2 max L4 max 10 4.5

Possible to transfer a workpiece at low-speed.

Applicable shaft type: K X = Long shaft side W1 = L1 = L3 = DShort shaft side X = W2 = Size 20, 30, 40 L2 = L4 = Y = (mm) (mm) X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 W2 L2 max Y Y Y Y Y L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 Size 10 15

CQ2

28.5 32.5 12 16 20 25 Foot (mm) Stroke range(mm) Bore (mm) A B L LD LG LH LS LT LX LY LZ X Y 5 to 30 52.2 25.2 13.5 4.5 2.8 12 17 13.2 2 34 29.5 44 8 4.5 CU 5 to 30 53 26 13.5 4.5 2.8 16 19 14 2 38 33.5 48 8 5 5 to 50 55 26 14.5 6.6 4 20 24 14 3.2 48 42 62 9.2 5.8 CQS 5 to 50 59 29 15 6.6 4 25 26 14 3.2 52 46 66 10.7 5.8 CQ2 MU Flange/CQ2WL Rod end male thread (mm) Bore size (mm) A1 L3 L4

CRQ2

Applicable shaft types: J, X, T W1 = L1 = L3 = X = W2 = L2 = L4 = Y = (mm) (mm) W2 L2 max Y Y Y Y Y W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 Size 10 15 20 30 40 X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 0.5 to 1.5 0.5 to 1.5 1 to 2 1 to 2 1