Digital Flow Switch ( compatible)

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Flow sensor

A fire or explosion can result. Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system.

Shock Absorbers and Rate Controls

(t odefReo l M ll P R I U w x (R t o , t,lt'o' 6.3t f ' tl.to.1" l2.roi, r/A 38 N/A 23 6 6.1 I t.2 0.59 Pil/PR0220ctl(s) 234 6.38 -od' o.ls f ' 12.70 iz tz.to|-, N/A 38 N/A 23 6 12 6.1 '|.2 0.77 Prr525CM(Sl 199 e.60Yl t.7o-&' r s.oo l, 25.4 lt.9-3r 5l 25 25 25 N/A 14.3 1.36 PMr55o(il(s) 250 e.60 f , r ?.

Digital Flow Switches

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VK3000

Plug that A port to avoid mistaking B port for the A port.

PFM7.eng

Flow adjustment valve [dr E] Display resolution [PrS] Auto-preset [EEP] Accumulated value hold [1E2] 100-split [oFF] Manual [oFF] OFF Used to lock the flow adjustment valve. Lock ring Warning: Danger: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Used to mount the product on a DIN rail or directly to a panel.

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Direct Solenoid

\e{ D C. 0d onel'grr 5.r 1 rr3 lbn o ( e-loTl -I Pilor Ahrs are a toubreshoorinq a'd and aG conneded In p3r4&l wirh rh sorenoid coi 3oihey riqhr when rhe sorenod ooirreads aG L:r.aa-ro'.-"ra.lr. Ihe SMC pilol ishl as$mbry is a spoc al lunchon box c!

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

t r r , " . . a : r i . . . , r i a , r . .

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t r r , " . . a : r i . . . , r i a , r . .

Prevents Micro-Bubbles

Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type

LVQ

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 5.5 to 6.0 17-5-66 5 Series LVQ Integral Fitting Type (Hyper Fittings) Construction Double acting type N.O. type Basic type N.C. type PB PB q q q VC PA PA VDW e e e VQ VX2 A B A B SMC SMC VX A A B A B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

NCY2 series

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

NCY2 series

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 E: Angle adjustment range 5 E: Angle adjustment range 5 B port Angle adjustment screw A port Clockwise rotation 0 8 0 e Allowable Lateral Load to the Piston Rod End gl 10 n a e nt gl e an m st t en u dj m a m st u ju m i in ad M Using friction fittings makes it easier to mount the load to the piston rod end.

Rotary Cylinder Series MRQ

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.