Rated Flow Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series]

Rated Flow Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: Out 1: NPN; Out 2: Analog 4 to 20 mA, Option 1: w/o Lead Wire and M8 Connector, Unit Specification: -, Option 2: -, Calibration Certificate: -

Rated Flow Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: Out 1: NPN; Out 2: Analog 4 to 20 mA, Option 1: -, Unit Specification: -, Option 2: -, Calibration Certificate: -

Rated Flow Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: Out 1: PNP; Out 2: Analog 4 to 20 mA, Option 1: -, Unit Specification: -, Option 2: -, Calibration Certificate: -

Rated Flow Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: L [Out: IO-Link, Switch Output (N/P); Func: None; Monitor Unit Model: None], Option 1: -, Unit Specification: -, Option 2: -, Calibration Certificate: -

Rated Flow Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: L2 [Out: IO-Link, Switch Output (N/P); Func: Switch Output (N/P); Monitor Unit Model: None], Option 1: -, Unit Specification: -, Option 2: -, Calibration Certificate: -

Rated Flow Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: L3 [Out: IO-Link, Switch Output (N/P); Func: Analog Voltage Output <-> External Input; Monitor Unit Model: PFG300 Series], Option 1: -, Unit Specification: -, Option 2: -, Calibration Certificate: -

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators L4 L3 L2 L1 47.8 P=17.5 28.8 5 Indicator light SI unit 58.1 Manual override PWR. L RUN SERIAL UNIT L ERR.

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 178 200 210.5 2 66 188.5 212.5 223 3 76.5 199 225 235.5 4 87 209.5 237.5 248 5 97.5 220 250 260.5 6 108 230.5 250 260.5 7 118.5 241 262.5 273 8 129 251.5 275 285.5 9 139.5 262 287.5 298 10 150 272.5 300 310.2 11 160.5 283 312.5 323 12 171 293.5 325 335.5 13 181.5 304 325 335.5 14 192 314.5

VQC

BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25

Electric Actuator/Slider Type

[mm] L4 [mm] L4 [mm] L4 [mm] 1,000 1,000 1,000 500 500 500 500 Mep m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0

Environment

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4 L2 2 L1 2 18.5 to 65 1 to 12.5 X 4 W2 18.5 to 65 CRB1 Caution (mm) MSU W1, W2 W1, W2 L1 L3, L2 L4 L1 L3, L2 L4 Size Size For the shaft patterns A45 and A46, a middle-cut chamfer may interfere with the center hole if the W1/W2 dimensions and (L1 L3), (L2 L4) dimensions are less than what are shown in the tables at right. 50 80 4.5 to 6 6.5 to 8.5 2 to 5.5 2 to 6.5 CRJ 63 100 6 to

Table of Contents

4 L2 2 L1 2 18.5 to 65 1 to 12.5 X 4 W2 18.5 to 65 CRB1 Caution (mm) MSU W1, W2 W1, W2 L1 L3, L2 L4 L1 L3, L2 L4 Size Size For the shaft patterns A45 and A46, a middle-cut chamfer may interfere with the center hole if the W1/W2 dimensions and (L1 L3), (L2 L4) dimensions are less than what are shown in the tables at right. 50 80 4.5 to 6 6.5 to 8.5 2 to 5.5 2 to 6.5 CRJ Courtesy of

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

4 L2 2 L1 2 18.5 to 65 1 to 12.5 X 4 W2 18.5 to 65 CRB1 Caution (mm) MSU W1, W2 W1, W2 L1 L3, L2 L4 L1 L3, L2 L4 Size Size For the shaft patterns A45 and A46, a middle-cut chamfer may interfere with the center hole if the W1/W2 dimensions and (L1 L3), (L2 L4) dimensions are less than what are shown in the tables at right. 50 80 4.5 to 6 6.5 to 8.5 2 to 5.5 2 to 6.5 CRJ Courtesy of

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

185.5 175 150 17.5 185.5 175 198 210.5 200 223 L1 L2 L3 L4 137.5 162.5 187.5 171 13.5 212.5 192 15.5 118.5 14.5 139.5 16.5 160.5 12.5 181.5 14.5 Stations 11 13 14 15 16 12 235.5 225 248 260.5 250 234 285.5 275 255 248 273 L1 L2 L3 L4 237.5 213 17.5 237.5 262.5 223.5 244.5 202.5 16.5 13 15 12 14 37 5 Port Solenoid Valve Series SX3000/5000 Stations SS5X3-45GDC4 C6 Note) L1 to L4 dimensions

Battery-less

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15

CRB2/CRBU2/CRB1

L4 max.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] L4 [mm] L4 [mm] L4 [mm] m Me L4 600 600 1000 1000 X Motorless 400 400 500 500 200 200 LAT 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 LC3F2 800 800 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5