AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

CV/MVGQ

A A A A A A B B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9

CV/MVGQ

A A A A A A B B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9

CA2

9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.

PF2A/PF2W

: (800) 258-9200-www.stevenengineering.com 6 1 2 Analog output (43.5) ZSP 8 4 Load 2 + Switch output White 7 3 4 ISA2 Black 5 1 3 Blue IS A PF2W5--1 ZSM 4 Output specifications A B PF2 Display unit (PF2W30/31) Pulse output only 42 62 12 to 24 VDC Sensor unit Pulse output + Analog output 52 72 2-3.4 43 Brown IF 1 2 6 Analog output Flow direction 4 8 Load 2 Data + Switch output White 4 3

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

air-filter-e

Element mounting figure 265 Industrial Filter Series FGC Replacement Procedure is P.476 Replacement Parts and Seal List How to Order FGC 1 A 04 C B N 002 Symbol Maximum operating pressure Symbol Element seal material Note 1) Maximum operating pressure 1 MPa 2 MPa 4 MPa Element seal material Non-asbestos Fluororesin NBR FKM 1 2 4 A Note 2) T N V Vessel material (wetted parts) Note 1) Not used

Air Preparation Equipment

Element mounting figure 265 Industrial Filter Series FGC Replacement Procedure is P.476 Replacement Parts and Seal List How to Order FGC 1 A 04 C B N 002 Symbol Maximum operating pressure Symbol Element seal material Note 1) Maximum operating pressure 1 MPa 2 MPa 4 MPa Element seal material Non-asbestos Fluororesin NBR FKM 1 2 4 A Note 2) T N V Vessel material (wetted parts) Note 1) Not used

Digital Flow Switches, Series PF2A, Series PF2W

SMC FLOW SWITCH Blue 5 1 12 to 24VDC Series PF2W5 35.8 A 40 UNIT RESET PF2W30-A SET Panel fitting dimension 8-M3 3 x 7.2 (= 21.6) 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black 1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

EXH SS5Y7-20 1/4 C10 3.60 0.93 0.88 0.27 3.60 0.93 2 to 20 (1) Valve stations Note) Values for 5 stations manifold with a 2 position single type valve. 4/2 (A/B) Location Valve 1,3,5 (P,EA,EB) Port 1/4 1/8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Port size 4,2 (A,B) Port Manifold

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

VFA3000

(1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2 1 4 , , 2 position double 2 position single : 0.66 02 03 04: 0.71 VFA5444 -X1 3 position exhaustcenter 1 8 39 (2.2) 44 (2.4) 02 03 04 3 8 1 2 1 4 , , : 0.66 02 03 04: 0.71 VFA5544 -X1 3 position pressuretcenter 1 8 36 (2) 15.3 (0.85) 39.6 (2.2) 15.3 (0.85) 02 03 04 ( ) for normal position.

Fluoropolymer Piping Equipment

Class 1 1 2 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 C 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B LVH LVD LVQ LVP LVW LQ1 LQ1 Note 1) Tubing of different sizes can only be used in combination if within the same body class.

SX

Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

ARJ1020F

Description ARJM10-4, -6, -10 Manifold base ARJ1020F-M5-06 ARJ1020F-M5-04 How to Order M5 ARJ 20 10 F 04 1 Option 1 0.2 MPa setting Miniature regulator Note 1) Compared with standard specifications, its adjusting spring has only been changed. It is not the product which does not allow the pressure more than 0.2 MPa. Adjusting spring is not replaceable.