AS-FPQ/AS-FPG

Handling Caution AS-F 1. Store away from direct sunlight at 40C or less. 2. Open the inner package of the double packaging in a clean room or other clean environment. TMH ASD AS Piping AS-FE Caution KE 1. Be sure to use sealant tape or liquid gasket at the taper thread part. Using without sealant tape or liquid gasket can cause air leakage.

AS-FPQ/AS-FPG

Handling Caution AS-F 1. Store away from direct sunlight at 40C or less. 2. Open the inner package of the double packaging in a clean room or other clean environment. TMH ASD AS Piping AS-FE Caution KE 1. Be sure to use sealant tape or liquid gasket at the taper thread part. Using without sealant tape or liquid gasket can cause air leakage.

Compact and Lightweight

L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM A10 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 F ZP3 T 10 13 16 A12 02 10.8 2 1.4 KQ2H02-M5N 04 3 4 1.8 06 3.2 6 Dimensions Per Vacuum Inlet: Barb Fitting C2 Model A Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

SZ3000

solenoid valves can be used at all of the manifold stations.

DOC1003626

Field name Example RTU mode ASCII mode (HEX) character data binary data Header : None Device address 0x01 0,1 0x01 Function 0x04 0,4 0x04 Quantity of bytes to read 0x02 0,2 0x02 Information of 0009h(Data display 1) 0x00FA 0,0,F,A 0x00,0xFA Checksum ASCII:LRC RTU:CRC F,F 0x39,0x73 Trailer CR/LF None Total quantity of byte 15 7 * Response message at an ambient temperature of 25.0C 3.13 Register



(Full span) 6 l/min (ANR) (at supply pressure 0.9 MPa) Free Within 1% F.S.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

7ND9071en

If the controller is ordered separately, the mounting parts for the assembly must be ordered at the same time. Ex d WARNING (ND9200, ND7200, ND9300): Use a cable gland and blind plug with suitable Ex d certification. For ambient temperature over 70 C / 158 F use a heat resistant cable and cable gland suitable for at least 90 C / 194 F.

125

AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

3 Port Solenoid Valve/

-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

5 Port Air Operated Valve

Description Material Note Body 1 Aluminum die-casted White Pilot plate 2 Aluminum die-casted Gray : Aluminum die-casted Resin VFA3130-F VFA1120-F End plate 3 White Piston 4 Resin Spool valve 5 Aluminum, HNBR Spring 6 Stainless steel Bracket Assembly Part No. Description Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Width across flats KA PL PG P (Rc, NPT) Cylinder port Width across flats B1 PW 4 x J TDe8 LZ PH Z + 1/2 stroke Z + l + 1/2 stroke GB MM MM TY E D D E C B H1 F F K A AL H1 l 10.2 AL A K H + Stroke ZZ + 2 stroke TT N BN C B h + l With rod boot on both sides ZZ + l + 2 stroke TZ TX S + Stroke H ZZ + 2 l + 2 stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD

VP300/500/700

1 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Pilot Operated Poppet Solenoid Valve Rubber Seal Series VP300/500/700 How to Order V100 A 2 4 3 VP B E 1 SY With bracket F Option SYJ Series VP solenoid valve Thread type (Only VP342, 542 or 742.) VK Nil F N T Rc G NPT NPTF Passage symbol Body size N.C.

VM

Key can be removed at the on and off positions. 90 T.T.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

Brake mechanism added

Black 0 V G Shield Connector pin arrangement A phase output pulse G A DB phase output pulse F B H E D C -X Counter value 0 1 2 3 4 3 2 1 699

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob