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Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

VZ100/300/500

Plate Assembly Manifold gasket DXT170-25-1A Manifold gasket Round head combination screw (With spring washer) Applicable base VV3Z1-01-1 VV4Z1-20-1 Blanking plate Manifold base Applicable base VV3Z1-01-1 VV4Z1-20-1 Manifold gasket Manifold base Mounting Screw Tightening Torques Caution Applicable base VV3Z1-01-1 VV4Z1-20-1 M2.5: 0.45 Nm Warning Manifold base When mounting a solenoid valve

REA/REB

Speed 600 mm/s D 20, 25, 32, 40 Attached from top with cap bolt Floating block L LA A Attached from bottom with cap bolt XB WF 2-SS (helical insert thread) Body FG XA LF Bolt size: MD R Note 2) S HL FF Note 1) HB Note 1) High Precision Guide Type REBH Switch rail FC D' Section D-D' (mm) FF Note 1) FE Note 1) FC BA BB CC A Bore size FH HB Note 1) SS FG MD R Note 2) LF XB HL L LA S WF XA 10

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single

REA/REB

increased (Maximum speed: 600 mm/s) RE A B Series REB introduced with a maximum speed of 600 mm/s.

VQZ1000/2000/3000

A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

L7 L6 L5 1021-VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

ZP

ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8 ZL ZP13UT ZP13CT 13 13 14 14 1.5 1 ZP16UT ZP16CT 16 16 17 17 ZY ZQ Elliptic ZF ZP 2004 U N ZP Material Pad diameter ZCU N NBR 2 x 4 (Breadth x Length) 2004 S AMJ Silicon rubber 3507 U 3.5 x 7 Urethane rubber 4010 F 4 x 10 Misc.

Shock Absorbers and Rate Controls

5M(81 25.4 /A 19.0 S(ltl | 6x 1.5 M99018199 orM.35M(B) 25.4 l.r/a 19.0 t 8 SC 20xl.5 M930282171 0[li{.5i,1(B} 38.0N/A 25.4 63 S(l{2Ix3 1t930?83171 OEM].OM(B} 44.5 r{/a 38.0 ? 1 5 S(ll25xl.5 ti930284171orMr.o[lf{BJ 44.5 fl/A 38.1 215 5(ltt35xl.5 M930285171 0Efi _25M 63.J38.0 43.0 2t0 sfitzth-12. 8ffi940 ($)0t[|Vc 49.049.6 )0.)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

HRX-OM-S004

How to see the serial number S O 001 January 2014 S O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2014 S Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in 2015 T 2 P alphabetical order, with O for January and Z for December 2016 U 3 Q Fig. 1-1 Position of the product label HRS Series 1.4Product Label 1-3 HRX-OM-S004 Chapter 1 Safety Instructions 1.5 Safety

•

114.5 5 1.8 ;t M~e'l 'Iii 1'B e . , G U4(~1~) 13.5 5 1.8 D I' F f .F ,Holl, (s. ) \16 Ii" 15.5 7 <.~ 48 , 5 6 8 10 ~"" ) .. ~ : 1~.p ' 7 2$ 30 ZPY25D 25 28 20 ... fl tS12 a~ ~ .

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side opposite port A Nil Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Port A: Rc(PT) 1/8 Solenoid on same side as port A S Type S42 (solenoid on same side as port

Series AS-FM/AS-M/ASD-FM

100 200 205 Inch size M5 standard 1/8 standard 1/4 standard 3.2 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" 4 6 8 Use a 1/8" tube.

VQ4000

thread Rc 1/4: Rc 1/4 thread 2 4 VQZ B A B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A B A 6 B A VQD 2 4 B A B A 5 D side B A 6.5 L1 2 4 B A B A 4 B A 2 4 Manual override B A B A 3 B A 4 2 B A A 2 A 4 2 B A A 1 SMC Indicator light A 2 4 R4.5 Stations 12 X 16.5 (External pilot port) Rc 1/8 9 9 106 10 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 SMC (Pilot EXH port) Rc 1/8 1 P 5 3 R2 R1 42 17.5

HRX-OM-M090

output 1 operation A Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.

HRX-OM-R005

output 1 operation A Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.