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Correction Factor C2 for Ambient Air Relative Humidity Vc: Actuator volume (mm3) D : Bore size (mm) s : Stroke (mm) Temperature Relative humidity Correction factor C2 Vc = D2s 4 25C 40C 10C 0.2 0.4 0.6 20% Fig. 2 Piping Volume Chart 0.5 1.0 1.3 40% 140 1.0 1.7 2.8 60% 2.1 4.0 5.9 75% 120 6 tube Correction Factor C3 for Supply Pressure Supply pressure (MPa) Correction factor C3 10 Tube volume

Symbol 04 08 Stations 4 stations F: With bracket 8 stations 1/2/3 port size Symbol Port size Barb fitting (Applicable tubing 4/2.5) 40 Connector cable Nil: Without connector cable 2 one-touch fitting C2 C1: With connector cable (Length 300 mm) C2: With connector cable (Length 600 mm) C3: With connector cable (Length 1000 mm) Note) The applicable tube of the barb fitting shows the tube outside

D-M9AL Bore size (mm) D A B C 6 10 15 20 25 32 19.5 0.5 7.5 11.5 A C 29.5 3 17.5 9 35.5 10 23.5 2 Electrical entry direction: Inward Electrical entry direction: Outward 43 13 31 5 44 15 32 7 53 15.5 41 7.5 Auto switch mounting dimensions (mm) CXSJ6,10 C3 10 Bore size B1 Symbol Auto switch model C2 D2 6 1 1 2 5.5 4 8 6 D1 D-A9 D-M9, D-M9W D-M9AL A1 B1 B1 C1, D1 C2, C3, D2 C1, D1 C2, C3, D2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats B3 e ZZ + Stroke 9 Cushion valve Width across flats 1.5 l 9 f h ZZ + Stroke With air cushion One-touch fitting port size P Built-in One-touch fittings H1 H G FZ FY FX FT AL FD ZZ A B1 E F Z B2 C2 H2 I B D K MM N NA NN P S Bore size

Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

Bore size Stroke Head Flange (G): ClM3G R0.5 Effective thread length 2 x FL 4 x FD Mounting hole H2 2 x P 2 x NN G G Width across flats B2 2 x FD Mounting hole Width across flats KA C2 D H1 Corner of the cover I Eh8 FY B MM AL A H Z + Stroke S + Stroke F 1.5 Width across flats B1 Width across flats lNA 20 to 32 FX FZ FT 40 ZZ + Stroke Head Flange (G) (mm) AL 14.5 A 12 B 34 B1 13 B2 26 C2

G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction

D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V

30 M26 x 1.5 62 20 8 25 135 55 15 M10 x 1.25 34.5 M26 x 1.5 64 20 8 25 137 55 15 42.5 M32 x 2 88 23 10 27 171 75 M14 x 1.5 21.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 B1 FT FX FY FZ H H1 A AL B B2 C2

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

M26 x 1.5 M10 x 1.25 30 55 15 137 25 8 20 64 M26 x 1.5 M10 x 1.25 34.5 55 15 171 27 10 23 88 M32 x 2 42.5 75 21.5 M14 x 1.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 H1 H FZ FY FX B1 FT B FD AL F A B2 C2

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Please contact us for the latest version.sales@ocaire.com, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, JC, PSE5*1 VAC SWITCH 1/8 PORT PT, .66138 lb

Pressure sensor for general purpose fluids, Fluid: fluid, including gas, that will not corrode SUS316L, Accuracy (ambient temp. of 25C): 1%F.S. or less, Repeatability: 0.2%F.S. or less, Enclosure: IP65, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, JD, PSE5*1 VAC SWITCH 1/8PORT NPT, .47300 lb

Pressure sensor for general purpose fluids, Fluid: fluid, including gas, that will not corrode SUS316L, Accuracy (ambient temp. of 25C): 1%F.S. or less, Repeatability: 0.2%F.S. or less, Enclosure: IP65, SENSOR, GENERAL FLUID, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, KD, PSE5*1 VAC SWITCH 1/4PORT NPT, .66138 lb

. -67No.PS-OMU0012-C Table for each pressure specification Applicable SMC pressure sensor Rated pressure range Display/set pressure range Display/min. setting unit PSE550 0 to 2 kPa -0.2 to to 2.1 kPa 0.001 kPa PSE531, PSE541, PSE561 0 to -101 kPa 10 to -105 kPa 0.1 kPa PSE533, PSE543, PSE563, PSE573 -100 to 100 kPa -105 to 105 kPa 0.1 kPa PSE532 0 to 100 kPa -10 to 105 kPa 0.1 kPa PSE564

Body Size: 20 (ΓΈ20mm), Body Material: S (Stainless Steel), Mounting Plate: None, Attachment: w/o Vibration Suppression Cover, Pressure Sensor: S (with Pressure Sensor; Part Number PSE541-M5-X2)

Please contact us for the latest version.sales@ocaire.com, SENSOR, GENERAL AIR, VACUUM, VACUUM SERIES, PSE531/PSE541/PSE561, JD, PSE5*1 VAC SWITCH 1/8PORT NPT, .21991 lb